Protective clothing and ESD protection in cleanrooms

Salme Nurmi

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

Original languageEnglish
Title of host publication34th R3-Nordic Contamination Control Symposium
Place of PublicationEspoo
PublisherVTT Technical Research Centre of Finland
Pages363-374
ISBN (Electronic)951-38-6285-2
ISBN (Print)951-38-6284-4
Publication statusPublished - 2003
MoE publication typeB3 Non-refereed article in conference proceedings
Event34th R3-Nordic Contamination Control Symposium - Turku, Finland
Duration: 2 Jun 20034 Jun 2003

Publication series

SeriesVTT Symposium
Number229
ISSN0357-9387

Conference

Conference34th R3-Nordic Contamination Control Symposium
CountryFinland
CityTurku
Period2/06/034/06/03

Keywords

  • electrostatic discharge (ESD)
  • ESD protective materials
  • ESD protective garments
  • cleanroom
  • electrostatic measurements
  • linting
  • clothing

Cite this

Nurmi, S. (2003). Protective clothing and ESD protection in cleanrooms. In 34th R3-Nordic Contamination Control Symposium (pp. 363-374). VTT Technical Research Centre of Finland. VTT Symposium, No. 229 https://www.vtt.fi/inf/pdf/symposiums/2003/S229.pdf