Pulsed laser deposition using diffractively shaped excimer-laser beams

V. Kekkonen (Corresponding Author), Antti Hakola, Jari Likonen, Y. Ge, T. Kajava

    Research output: Contribution to journalArticleScientificpeer-review

    3 Citations (Scopus)

    Abstract

    Controlling laser-pulse parameters is an important issue in pulsed laser deposition (PLD). In particular, homogenization of laser beams improves the reproducibility of the PLD process by guaranteeing a uniform intensity distribution and a well-defined energy density of the laser spot on the target. We have integrated a beam-homogenization system into our PLD setup, and here we discuss the results and advantages of using such a system. The optical setup is based on diffractive beam-splitter gratings, which produce a 2×2-mm2 flat-top distribution with fluences of the order of 3 J/cm2 on the target. We demonstrate the applicability of this technique by depositing thin films of ferromagnetic Ni–Mn–Ga shape-memory alloys. Magnetic and structural characterization, including secondary ion mass spectrometry (SIMS), indicate that nearly stoichiometric composition and crystallization in the desired martensitic phase is obtained for films deposited on Al2O3 under optimal conditions. In contrast, the formation of silicide compounds at temperatures above 500 C is detrimental in the deposition of Ni–Mn–Ga films directly on silicon.
    Original languageEnglish
    Pages (from-to)423-430
    Number of pages8
    JournalApplied Physics A: Materials Science and Processing
    Volume108
    Issue number2
    DOIs
    Publication statusPublished - 2012
    MoE publication typeA1 Journal article-refereed

    Fingerprint

    Excimer lasers
    Pulsed laser deposition
    excimer lasers
    pulsed laser deposition
    Laser beams
    laser beams
    homogenizing
    beam splitters
    Silicon
    shape memory alloys
    Secondary ion mass spectrometry
    Crystallization
    Shape memory effect
    secondary ion mass spectrometry
    lasers
    Laser pulses
    fluence
    flux density
    gratings
    crystallization

    Cite this

    @article{ccdf2b94067d4d31a28231399d0407ac,
    title = "Pulsed laser deposition using diffractively shaped excimer-laser beams",
    abstract = "Controlling laser-pulse parameters is an important issue in pulsed laser deposition (PLD). In particular, homogenization of laser beams improves the reproducibility of the PLD process by guaranteeing a uniform intensity distribution and a well-defined energy density of the laser spot on the target. We have integrated a beam-homogenization system into our PLD setup, and here we discuss the results and advantages of using such a system. The optical setup is based on diffractive beam-splitter gratings, which produce a 2×2-mm2 flat-top distribution with fluences of the order of 3 J/cm2 on the target. We demonstrate the applicability of this technique by depositing thin films of ferromagnetic Ni–Mn–Ga shape-memory alloys. Magnetic and structural characterization, including secondary ion mass spectrometry (SIMS), indicate that nearly stoichiometric composition and crystallization in the desired martensitic phase is obtained for films deposited on Al2O3 under optimal conditions. In contrast, the formation of silicide compounds at temperatures above 500 ∘C is detrimental in the deposition of Ni–Mn–Ga films directly on silicon.",
    author = "V. Kekkonen and Antti Hakola and Jari Likonen and Y. Ge and T. Kajava",
    year = "2012",
    doi = "10.1007/s00339-012-6904-8",
    language = "English",
    volume = "108",
    pages = "423--430",
    journal = "Applied Physics A: Materials Science and Processing",
    issn = "0947-8396",
    publisher = "Springer",
    number = "2",

    }

    Pulsed laser deposition using diffractively shaped excimer-laser beams. / Kekkonen, V. (Corresponding Author); Hakola, Antti; Likonen, Jari; Ge, Y.; Kajava, T.

    In: Applied Physics A: Materials Science and Processing, Vol. 108, No. 2, 2012, p. 423-430.

    Research output: Contribution to journalArticleScientificpeer-review

    TY - JOUR

    T1 - Pulsed laser deposition using diffractively shaped excimer-laser beams

    AU - Kekkonen, V.

    AU - Hakola, Antti

    AU - Likonen, Jari

    AU - Ge, Y.

    AU - Kajava, T.

    PY - 2012

    Y1 - 2012

    N2 - Controlling laser-pulse parameters is an important issue in pulsed laser deposition (PLD). In particular, homogenization of laser beams improves the reproducibility of the PLD process by guaranteeing a uniform intensity distribution and a well-defined energy density of the laser spot on the target. We have integrated a beam-homogenization system into our PLD setup, and here we discuss the results and advantages of using such a system. The optical setup is based on diffractive beam-splitter gratings, which produce a 2×2-mm2 flat-top distribution with fluences of the order of 3 J/cm2 on the target. We demonstrate the applicability of this technique by depositing thin films of ferromagnetic Ni–Mn–Ga shape-memory alloys. Magnetic and structural characterization, including secondary ion mass spectrometry (SIMS), indicate that nearly stoichiometric composition and crystallization in the desired martensitic phase is obtained for films deposited on Al2O3 under optimal conditions. In contrast, the formation of silicide compounds at temperatures above 500 ∘C is detrimental in the deposition of Ni–Mn–Ga films directly on silicon.

    AB - Controlling laser-pulse parameters is an important issue in pulsed laser deposition (PLD). In particular, homogenization of laser beams improves the reproducibility of the PLD process by guaranteeing a uniform intensity distribution and a well-defined energy density of the laser spot on the target. We have integrated a beam-homogenization system into our PLD setup, and here we discuss the results and advantages of using such a system. The optical setup is based on diffractive beam-splitter gratings, which produce a 2×2-mm2 flat-top distribution with fluences of the order of 3 J/cm2 on the target. We demonstrate the applicability of this technique by depositing thin films of ferromagnetic Ni–Mn–Ga shape-memory alloys. Magnetic and structural characterization, including secondary ion mass spectrometry (SIMS), indicate that nearly stoichiometric composition and crystallization in the desired martensitic phase is obtained for films deposited on Al2O3 under optimal conditions. In contrast, the formation of silicide compounds at temperatures above 500 ∘C is detrimental in the deposition of Ni–Mn–Ga films directly on silicon.

    U2 - 10.1007/s00339-012-6904-8

    DO - 10.1007/s00339-012-6904-8

    M3 - Article

    VL - 108

    SP - 423

    EP - 430

    JO - Applied Physics A: Materials Science and Processing

    JF - Applied Physics A: Materials Science and Processing

    SN - 0947-8396

    IS - 2

    ER -