Pulsed laser deposition using diffractively shaped excimer-laser beams

V. Kekkonen (Corresponding Author), Antti Hakola, Jari Likonen, Y. Ge, T. Kajava

Research output: Contribution to journalArticleScientificpeer-review

3 Citations (Scopus)

Abstract

Controlling laser-pulse parameters is an important issue in pulsed laser deposition (PLD). In particular, homogenization of laser beams improves the reproducibility of the PLD process by guaranteeing a uniform intensity distribution and a well-defined energy density of the laser spot on the target. We have integrated a beam-homogenization system into our PLD setup, and here we discuss the results and advantages of using such a system. The optical setup is based on diffractive beam-splitter gratings, which produce a 2×2-mm2 flat-top distribution with fluences of the order of 3 J/cm2 on the target. We demonstrate the applicability of this technique by depositing thin films of ferromagnetic Ni–Mn–Ga shape-memory alloys. Magnetic and structural characterization, including secondary ion mass spectrometry (SIMS), indicate that nearly stoichiometric composition and crystallization in the desired martensitic phase is obtained for films deposited on Al2O3 under optimal conditions. In contrast, the formation of silicide compounds at temperatures above 500 C is detrimental in the deposition of Ni–Mn–Ga films directly on silicon.
Original languageEnglish
Pages (from-to)423-430
Number of pages8
JournalApplied Physics A: Materials Science and Processing
Volume108
Issue number2
DOIs
Publication statusPublished - 2012
MoE publication typeA1 Journal article-refereed

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Excimer lasers
Pulsed laser deposition
excimer lasers
pulsed laser deposition
Laser beams
laser beams
homogenizing
beam splitters
Silicon
shape memory alloys
Secondary ion mass spectrometry
Crystallization
Shape memory effect
secondary ion mass spectrometry
lasers
Laser pulses
fluence
flux density
gratings
crystallization

Cite this

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title = "Pulsed laser deposition using diffractively shaped excimer-laser beams",
abstract = "Controlling laser-pulse parameters is an important issue in pulsed laser deposition (PLD). In particular, homogenization of laser beams improves the reproducibility of the PLD process by guaranteeing a uniform intensity distribution and a well-defined energy density of the laser spot on the target. We have integrated a beam-homogenization system into our PLD setup, and here we discuss the results and advantages of using such a system. The optical setup is based on diffractive beam-splitter gratings, which produce a 2×2-mm2 flat-top distribution with fluences of the order of 3 J/cm2 on the target. We demonstrate the applicability of this technique by depositing thin films of ferromagnetic Ni–Mn–Ga shape-memory alloys. Magnetic and structural characterization, including secondary ion mass spectrometry (SIMS), indicate that nearly stoichiometric composition and crystallization in the desired martensitic phase is obtained for films deposited on Al2O3 under optimal conditions. In contrast, the formation of silicide compounds at temperatures above 500 ∘C is detrimental in the deposition of Ni–Mn–Ga films directly on silicon.",
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Pulsed laser deposition using diffractively shaped excimer-laser beams. / Kekkonen, V. (Corresponding Author); Hakola, Antti; Likonen, Jari; Ge, Y.; Kajava, T.

In: Applied Physics A: Materials Science and Processing, Vol. 108, No. 2, 2012, p. 423-430.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Pulsed laser deposition using diffractively shaped excimer-laser beams

AU - Kekkonen, V.

AU - Hakola, Antti

AU - Likonen, Jari

AU - Ge, Y.

AU - Kajava, T.

PY - 2012

Y1 - 2012

N2 - Controlling laser-pulse parameters is an important issue in pulsed laser deposition (PLD). In particular, homogenization of laser beams improves the reproducibility of the PLD process by guaranteeing a uniform intensity distribution and a well-defined energy density of the laser spot on the target. We have integrated a beam-homogenization system into our PLD setup, and here we discuss the results and advantages of using such a system. The optical setup is based on diffractive beam-splitter gratings, which produce a 2×2-mm2 flat-top distribution with fluences of the order of 3 J/cm2 on the target. We demonstrate the applicability of this technique by depositing thin films of ferromagnetic Ni–Mn–Ga shape-memory alloys. Magnetic and structural characterization, including secondary ion mass spectrometry (SIMS), indicate that nearly stoichiometric composition and crystallization in the desired martensitic phase is obtained for films deposited on Al2O3 under optimal conditions. In contrast, the formation of silicide compounds at temperatures above 500 ∘C is detrimental in the deposition of Ni–Mn–Ga films directly on silicon.

AB - Controlling laser-pulse parameters is an important issue in pulsed laser deposition (PLD). In particular, homogenization of laser beams improves the reproducibility of the PLD process by guaranteeing a uniform intensity distribution and a well-defined energy density of the laser spot on the target. We have integrated a beam-homogenization system into our PLD setup, and here we discuss the results and advantages of using such a system. The optical setup is based on diffractive beam-splitter gratings, which produce a 2×2-mm2 flat-top distribution with fluences of the order of 3 J/cm2 on the target. We demonstrate the applicability of this technique by depositing thin films of ferromagnetic Ni–Mn–Ga shape-memory alloys. Magnetic and structural characterization, including secondary ion mass spectrometry (SIMS), indicate that nearly stoichiometric composition and crystallization in the desired martensitic phase is obtained for films deposited on Al2O3 under optimal conditions. In contrast, the formation of silicide compounds at temperatures above 500 ∘C is detrimental in the deposition of Ni–Mn–Ga films directly on silicon.

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M3 - Article

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