Quasidynamic calibration of stroboscopic scanning white light interferometer with a transfer standard

Keyphrases

• Transfer Standard 100%
• Scanning White Light Interferometer 100%
• Vertical Scaling 40%
• Reference Plane 40%
• Measurement Results 20%
• Repeatability 20%
• Light Source 20%
• Interferometer 20%
• Laser Interferometry 20%
• Capacitive Sensor 20%
• Moving Mirrors 20%
• Light-emitting Diodes 20%
• Reference Instrument 20%
• Micro-nano 20%
• CCD Camera 20%
• Duty Cycle 20%
• Halogen Light 20%
• Halogen Lamp 20%
• Error Characterization 20%
• Amplification Coefficient 20%
• Scale Calibration 20%
• Piezo 20%
• Static Motion 20%
• Invar Steel 20%
• Flexure 20%
• Sensor Feedback 20%
• Nanoelectromechanical Systems 20%
• Error Calibration 20%
• Static Features 20%
• Vertical Position 20%
• Scale Amplification 20%
• Traceable Calibration 20%
• Out-of-plane Movement 20%

INIS

• calibration 100%
• interferometers 100%
• mirrors 50%
• halogens 33%
• devices 33%
• errors 33%
• feedback 16%
• motion 16%
• sensors 16%
• range 16%
• cameras 16%
• lasers 16%
• amplification 16%
• steels 16%
• meters 16%
• interferometry 16%
• light sources 16%
• lamps 16%
• ccd 16%
• light emitting diodes 16%
• invar 16%

Engineering

• Reference Plane 100%
• Traceability 50%
• Capacitive 50%
• Repeatability 50%
• Duty Cycle 50%
• Light-Emitting Diode 50%
• Feedback Sensor 50%
• Electromechanical System 50%
• Flexure 50%
• Light Source 50%
• Interferometry 50%