Qubit-Compatible Substrates With Superconducting Through-Silicon Vias

Kestutis Grigoras, Nikolai Yurttagul, Jukka-Pekka Kaikkonen, Elsa T. Mannila (Corresponding Author), Patrik Eskelinen, D. P. Lozano, H.-X. Li, M. Rommel, D. Shiri, Nils Tiencken, Slawomir Simbierowicz, Alberto Ronzani, Joel Hätinen, Debopam Datta, Visa Vesterinen, Leif Grönberg, J. Biznarova, A. Fadavi Roudsari, S. Kosen, A. OsmanMika Prunnila, Juha Hassel, J. Bylander, Joonas Govenius

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