Quick and clean: Stencil lithography for wafer-scale fabrication of superconducting tunnel junctions
- V. Savu
- , Jani Kivioja
- , Jouni Ahopelto
- , J. Brugger
- Ecole Polytechnique Fédérale de Lausanne (EPFL)
Research output: Contribution to journal › Article › Scientific › peer-review
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