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Rapid low-temperature processing of metal-oxide thin film transistors with combined far ultraviolet and thermal annealing

  • Jaakko Leppäniemi*
  • , K. Ojanperä
  • , Terho Kololuoma
  • , Olli-Heikki Huttunen
  • , J. Dahl
  • , M. Tuominen
  • , Pasi Laukkanen
  • , Himadri Majumdar
  • , Ari Alastalo
    • *Corresponding author for this work
  • University of Turku

Research output: Contribution to journal › Article › Scientific › peer-review

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