Rapid thermal annealing of SI1-x GEx layers formed by germanium ion implantation

Zheng Xia (Corresponding Author), Jaakko Saarilahti, Hannu Ronkainen, Simo Eränen, Ilkka Suni, Jyrki Molarius, Pekka Kuivalainen, Eero Ristolainen, T Tuomi

    Research output: Contribution to journalArticleScientificpeer-review

    6 Citations (Scopus)

    Fingerprint

    Dive into the research topics of 'Rapid thermal annealing of SI1-x GEx layers formed by germanium ion implantation'. Together they form a unique fingerprint.

    Material Science

    Pharmacology, Toxicology and Pharmaceutical Science