RBS channeling spectroscopy of ge implanted epitaxial SI1-x Gex layers

Jaakko Saarilahti; Zheng Xia; Hannu Ronkainen; S. Eränen; Pekka Kuivalainen

RBS channeling spectroscopy of ge implanted epitaxial SI_1-x Ge_x layers

Jaakko Saarilahti, Zheng Xia, Hannu Ronkainen, S. Eränen, Pekka Kuivalainen

BA191A MEMS

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

Original language	English
Title of host publication	16th Nordic Semiconductor Meeting
Subtitle of host publication	Abstracts
Editors	Haflidi P. Gislason, Vidar Gudmundsson, Gerlinde Xander
Place of Publication	Reykjavík
Publisher	University of Iceland
Pages	164
Publication status	Published - 1994
MoE publication type	Not Eligible
Event	16th Nordic Semiconductor Meeting - Laugarvatn, Iceland Duration: 12 Jun 1994 → 15 Jun 1994

Conference

Conference	16th Nordic Semiconductor Meeting
Country	Iceland
City	Laugarvatn
Period	12/06/94 → 15/06/94

Access to Document

Proceedings (Open Access)

Cite this

Saarilahti, J., Xia, Z., Ronkainen, H., Eränen, S., & Kuivalainen, P. (1994). RBS channeling spectroscopy of ge implanted epitaxial SI_1-x Ge_x layers. In H. P. Gislason, V. Gudmundsson, & G. Xander (Eds.), 16th Nordic Semiconductor Meeting: Abstracts (pp. 164). University of Iceland.

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title = "RBS channeling spectroscopy of ge implanted epitaxial SI1-x Gex layers",

author = "Jaakko Saarilahti and Zheng Xia and Hannu Ronkainen and S. Er{\"a}nen and Pekka Kuivalainen",

note = "Project code: ELET9124 Tiivistelm{\"a}; 16th Nordic Semiconductor Meeting ; Conference date: 12-06-1994 Through 15-06-1994",

year = "1994",

language = "English",

pages = "164",

editor = "Gislason, {Haflidi P.} and Vidar Gudmundsson and Gerlinde Xander",

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RBS channeling spectroscopy of ge implanted epitaxial SI_1-x Ge_x layers. / Saarilahti, Jaakko; Xia, Zheng; Ronkainen, Hannu; Eränen, S.; Kuivalainen, Pekka.

16th Nordic Semiconductor Meeting: Abstracts. ed. / Haflidi P. Gislason; Vidar Gudmundsson; Gerlinde Xander. Reykjavík : University of Iceland, 1994. p. 164.

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

TY - CHAP

T1 - RBS channeling spectroscopy of ge implanted epitaxial SI1-x Gex layers

AU - Saarilahti, Jaakko

AU - Xia, Zheng

AU - Ronkainen, Hannu

AU - Eränen, S.

AU - Kuivalainen, Pekka

N1 - Project code: ELET9124 Tiivistelmä

PY - 1994

Y1 - 1994

UR - https://apps.dtic.mil/docs/citations/ADA359786

M3 - Conference abstract in proceedings

SP - 164

BT - 16th Nordic Semiconductor Meeting

A2 - Gislason, Haflidi P.

A2 - Gudmundsson, Vidar

A2 - Xander, Gerlinde

PB - University of Iceland

CY - Reykjavík

T2 - 16th Nordic Semiconductor Meeting

Y2 - 12 June 1994 through 15 June 1994

ER -