@inbook{17409c56acca486aa96a7bc155040a00,
title = "RBS channeling spectroscopy of ge implanted epitaxial SI1-x Gex layers",
author = "Jaakko Saarilahti and Zheng Xia and Hannu Ronkainen and S. Er{\"a}nen and Pekka Kuivalainen",
note = "Project code: ELET9124 Tiivistelm{\"a}; 16th Nordic Semiconductor Meeting ; Conference date: 12-06-1994 Through 15-06-1994",
year = "1994",
language = "English",
pages = "164",
editor = "Gislason, {Haflidi P.} and Vidar Gudmundsson and Gerlinde Xander",
booktitle = "16th Nordic Semiconductor Meeting",
publisher = "University of Iceland",
address = "Iceland",
}