RBS channeling spectroscopy of ge implanted epitaxial SI1-x Gex layers

Jaakko Saarilahti, Zheng Xia, Hannu Ronkainen, S. Eränen, Pekka Kuivalainen

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    Original languageEnglish
    Title of host publication16th Nordic Semiconductor Meeting
    Subtitle of host publicationAbstracts
    EditorsHaflidi P. Gislason, Vidar Gudmundsson, Gerlinde Xander
    Place of PublicationReykjavík
    PublisherUniversity of Iceland
    Pages164
    Publication statusPublished - 1994
    MoE publication typeNot Eligible
    Event16th Nordic Semiconductor Meeting - Laugarvatn, Iceland
    Duration: 12 Jun 199415 Jun 1994

    Conference

    Conference16th Nordic Semiconductor Meeting
    Country/TerritoryIceland
    CityLaugarvatn
    Period12/06/9415/06/94

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