RBS channeling spectroscopy of ge implanted epitaxial SI1-x Gex layers

Jaakko Saarilahti, Zheng Xia, Hannu Ronkainen, S. Eränen, Pekka Kuivalainen

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Original languageEnglish
Title of host publication16th Nordic Semiconductor Meeting
Subtitle of host publicationAbstracts
EditorsHaflidi P. Gislason, Vidar Gudmundsson, Gerlinde Xander
Place of PublicationReykjavík
PublisherUniversity of Iceland
Pages164
Publication statusPublished - 1994
MoE publication typeNot Eligible
Event16th Nordic Semiconductor Meeting - Laugarvatn, Iceland
Duration: 12 Jun 199415 Jun 1994

Conference

Conference16th Nordic Semiconductor Meeting
CountryIceland
CityLaugarvatn
Period12/06/9415/06/94

Cite this

Saarilahti, J., Xia, Z., Ronkainen, H., Eränen, S., & Kuivalainen, P. (1994). RBS channeling spectroscopy of ge implanted epitaxial SI1-x Gex layers. In H. P. Gislason, V. Gudmundsson, & G. Xander (Eds.), 16th Nordic Semiconductor Meeting: Abstracts (pp. 164). University of Iceland.