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RBS channeling spectroscopy of Ge implanted epitaxial Si1-x Gex layers

  • Jaakko Saarilahti
  • , Zheng Xia
  • , Hannu Ronkainen
  • , Pekka Kuivalainen
  • , Ilkka Suni

    Research output: Contribution to journal › Article › Scientific › peer-review

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