Skip to main navigation Skip to search Skip to main content

Reactive sputter deposition and properties of TaxN thin films

  • Tommi Riekkinen
  • , Jyrki Molarius
  • , T. Laurila
  • , Arto Nurmela
  • , Ilkka Suni
  • , J.K. Kivilahti
  • Helsinki University of Technology

Research output: Contribution to journal › Article in a proceedings journal › Scientific › peer-review

171   Link opens in a new tab Citations (Scopus)

Fingerprint

Dive into the research topics of 'Reactive sputter deposition and properties of TaxN thin films'. Together they form a unique fingerprint.
Sort by

Keyphrases

Chemistry

INIS

Material Science