Reactive sputter deposition and properties of TaxN thin films

Tommi Riekkinen, Jyrki Molarius, T. Laurila, Arto Nurmela, Ilkka Suni, J.K. Kivilahti

Research output: Contribution to journalArticle in a proceedings journalScientificpeer-review

129 Citations (Scopus)

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Chemical Compounds

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