Reactively co-sputtered in situ annealed superconducting Y1Ba2Cu3O7-x thin films

Jorma Salmi; Jaakko Saarilahti; Ilkka Suni

doi:10.1016/B978-0-444-89353-6.50086-5

Reactively co-sputtered in situ annealed superconducting Y₁Ba₂Cu₃O_7-x thin films

Jorma Salmi
, Jaakko Saarilahti
, Ilkka Suni

VTT (former employee or external)

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Abstract

Thin films of Y₁Ba₂Cu₃O_7-x have been deposited using reactive co-sputtering from Y, BaCu and Cu targets and combined with in situ postannealing. Zero resistance temperatures of 89 K on cubic yttrium stabilized zirconia substrates and 82 K on sapphire substrates with ZrO₂ buffer layer have been achieved. Effects of deposition and postannealing parameters on thin film stoichiometry, morphology and superconducting properties are discussed.

Original language	English
Title of host publication	High Tc Superconductor Thin Films
Subtitle of host publication	Proceedings of Symposium A1 on High Temperature Superconductor Thin Films
Editors	L. Correra
Publisher	North-Holland Publ Co
Pages	529-533
ISBN (Print)	978-0-444-89353-6
DOIs	https://doi.org/10.1016/B978-0-444-89353-6.50086-5
Publication status	Published - 1992
MoE publication type	A4 Article in a conference publication
Event	International Conference on Advanced Materials, ICAM '91 - Strasbourg, France Duration: 27 May 1991 → 31 May 1991

Conference

Conference	International Conference on Advanced Materials, ICAM '91
Country/Territory	France
City	Strasbourg
Period	27/05/91 → 31/05/91

Access to Document

10.1016/B978-0-444-89353-6.50086-5

Cite this

@inproceedings{d0b59836701d4f3695f773d6bbe44d50,

title = "Reactively co-sputtered in situ annealed superconducting Y1Ba2Cu3O7-x thin films",

abstract = "Thin films of Y1Ba2Cu3O7-x have been deposited using reactive co-sputtering from Y, BaCu and Cu targets and combined with in situ postannealing. Zero resistance temperatures of 89 K on cubic yttrium stabilized zirconia substrates and 82 K on sapphire substrates with ZrO2 buffer layer have been achieved. Effects of deposition and postannealing parameters on thin film stoichiometry, morphology and superconducting properties are discussed.",

author = "Jorma Salmi and Jaakko Saarilahti and Ilkka Suni",

note = "Project code: puo80141; International Conference on Advanced Materials, ICAM '91 ; Conference date: 27-05-1991 Through 31-05-1991",

year = "1992",

doi = "10.1016/B978-0-444-89353-6.50086-5",

language = "English",

isbn = "978-0-444-89353-6",

pages = "529--533",

editor = "L. Correra",

booktitle = "High Tc Superconductor Thin Films",

publisher = "North-Holland Publ Co",

address = "Netherlands",

}

Salmi, J, Saarilahti, J & Suni, I 1992, Reactively co-sputtered in situ annealed superconducting Y₁Ba₂Cu₃O_7-x thin films. in L Correra (ed.), High Tc Superconductor Thin Films: Proceedings of Symposium A1 on High Temperature Superconductor Thin Films. North-Holland Publ Co, pp. 529-533, International Conference on Advanced Materials, ICAM '91, Strasbourg, France, 27/05/91. https://doi.org/10.1016/B978-0-444-89353-6.50086-5

Reactively co-sputtered in situ annealed superconducting Y₁Ba₂Cu₃O_7-x thin films. / Salmi, Jorma; Saarilahti, Jaakko; Suni, Ilkka.
High Tc Superconductor Thin Films: Proceedings of Symposium A1 on High Temperature Superconductor Thin Films. ed. / L. Correra. North-Holland Publ Co, 1992. p. 529-533.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Reactively co-sputtered in situ annealed superconducting Y1Ba2Cu3O7-x thin films

AU - Salmi, Jorma

AU - Saarilahti, Jaakko

AU - Suni, Ilkka

N1 - Project code: puo80141

PY - 1992

Y1 - 1992

N2 - Thin films of Y1Ba2Cu3O7-x have been deposited using reactive co-sputtering from Y, BaCu and Cu targets and combined with in situ postannealing. Zero resistance temperatures of 89 K on cubic yttrium stabilized zirconia substrates and 82 K on sapphire substrates with ZrO2 buffer layer have been achieved. Effects of deposition and postannealing parameters on thin film stoichiometry, morphology and superconducting properties are discussed.

AB - Thin films of Y1Ba2Cu3O7-x have been deposited using reactive co-sputtering from Y, BaCu and Cu targets and combined with in situ postannealing. Zero resistance temperatures of 89 K on cubic yttrium stabilized zirconia substrates and 82 K on sapphire substrates with ZrO2 buffer layer have been achieved. Effects of deposition and postannealing parameters on thin film stoichiometry, morphology and superconducting properties are discussed.

U2 - 10.1016/B978-0-444-89353-6.50086-5

DO - 10.1016/B978-0-444-89353-6.50086-5

M3 - Conference article in proceedings

SN - 978-0-444-89353-6

SP - 529

EP - 533

BT - High Tc Superconductor Thin Films

A2 - Correra, L.

PB - North-Holland Publ Co

T2 - International Conference on Advanced Materials, ICAM '91

Y2 - 27 May 1991 through 31 May 1991