Real-time HCl gas detection at parts-per-billion level concentrations utilising a diode laser and a bismuth-doped fibre amplifier

Hildén Panu, Rajamäki Timo (Corresponding Author), Fordell Thomas, Jarkko Makkonen, Sergei Alyshev, Alexandr Kharakhordin, Sergei Firstov

    Research output: Contribution to journalArticleScientificpeer-review

    Abstract

    HCl measurements in a cleanroom environment are carried out using a cavity ring-down analyser in order to get an estimate of the HCl concentrations that can be expected to be present in semiconductor manufacturing. HCl is a reactive gas and the materials used for gas sampling and transportation have a significant effect on the measurement response time; hence, data on HCl adsorption to different materials is also provided. Finally, a light source operating at 1742 nm that can be used for HCl detection in a multi-gas analyser based on multipass photo-acoustic spectroscopy is presented. Preliminary results indicate that sub-ppb detection levels are achievable using this approach even for HCl.

    Original languageEnglish
    Article number055206
    JournalMeasurement Science and Technology
    Volume32
    Issue number5
    DOIs
    Publication statusPublished - May 2021
    MoE publication typeA1 Journal article-refereed

    Keywords

    • bismuth
    • cleanroom
    • fibre
    • gas sensing
    • laser
    • photoacoustic spectroscopy

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