Recent advances in atomic layer deposition for microelectromechanical systems

Riikka Puurunen

Research output: Contribution to conference › Conference article › Scientific

Original languageEnglish
Publication statusPublished - 2014
EventMaterials & Nanoscience Seminar - Boulder, United States
Duration: 17 Mar 2014 → 17 Mar 2014

Seminar

SeminarMaterials & Nanoscience Seminar
CountryUnited States
CityBoulder
Period17/03/14 → 17/03/14

Cite this

Puurunen, R. (2014). Recent advances in atomic layer deposition for microelectromechanical systems. Paper presented at Materials & Nanoscience Seminar, Boulder, United States.
Puurunen, Riikka. / Recent advances in atomic layer deposition for microelectromechanical systems. Paper presented at Materials & Nanoscience Seminar, Boulder, United States.
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title = "Recent advances in atomic layer deposition for microelectromechanical systems",
author = "Riikka Puurunen",
year = "2014",
language = "English",
note = "Materials & Nanoscience Seminar ; Conference date: 17-03-2014 Through 17-03-2014",

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Puurunen, R 2014, 'Recent advances in atomic layer deposition for microelectromechanical systems' Paper presented at Materials & Nanoscience Seminar, Boulder, United States, 17/03/14 - 17/03/14, .

Recent advances in atomic layer deposition for microelectromechanical systems. / Puurunen, Riikka.

2014. Paper presented at Materials & Nanoscience Seminar, Boulder, United States.

Research output: Contribution to conference › Conference article › Scientific

TY - CONF

T1 - Recent advances in atomic layer deposition for microelectromechanical systems

AU - Puurunen, Riikka

PY - 2014

Y1 - 2014

M3 - Conference article

ER -

Puurunen R. Recent advances in atomic layer deposition for microelectromechanical systems. 2014. Paper presented at Materials & Nanoscience Seminar, Boulder, United States.