Recent advances in atomic layer deposition for microelectromechanical systems

Riikka Puurunen

Research output: Contribution to conferenceConference articleScientific

Original languageEnglish
Publication statusPublished - 2014
EventMaterials & Nanoscience Seminar - Boulder, United States
Duration: 17 Mar 201417 Mar 2014

Seminar

SeminarMaterials & Nanoscience Seminar
CountryUnited States
CityBoulder
Period17/03/1417/03/14

Cite this

Puurunen, R. (2014). Recent advances in atomic layer deposition for microelectromechanical systems. Paper presented at Materials & Nanoscience Seminar, Boulder, United States.