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Recent advances in atomic layer deposition for microelectromechanical systems

  • Riikka Puurunen

Research output: Contribution to conference › Conference article › Scientific

Original languageEnglish
Publication statusPublished - 2014
EventMaterials & Nanoscience Seminar - Boulder, United States
Duration: 17 Mar 2014 → 17 Mar 2014

Seminar

SeminarMaterials & Nanoscience Seminar
Country/TerritoryUnited States
CityBoulder
Period17/03/14 → 17/03/14

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