The goal of this work was to investigate, whether stiction between parallel, smooth silicon surfaces can be decreased by thin inorganic films grown by atomic layer deposition (ALD). Test structures based on the cantilever-beam-array (CBA) method were fabricated and coated with ALD layers varying in chemical nature and roughness.
Rough crystalline TiO 2 decreased the adhesion energy orders of magnitude as compared to Si and other smooth films, indicating that TiO 2 and other crystalline ALD films are candidates for anti-stiction layers in MEMS.
|Title of host publication||Proceedings|
|Subtitle of host publication||16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS 2011|
|Publisher||IEEE Institute of Electrical and Electronic Engineers|
|Publication status||Published - 2011|
|MoE publication type||A4 Article in a conference publication|
|Event||16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China|
Duration: 5 Jun 2011 → 9 Jun 2011
|Conference||16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11|
|Period||5/06/11 → 9/06/11|