Reducing stiction in Microelectromechanical Systems by nanometer-scale films grown by atomic layer deposition

Riikka Puurunen, Ari Häärä, Heini Ritala, James R. Dekker, Markku Kainlauri, Harri Pohjonen, Tommi Suni, Jyrki Kiihamäki, E. Santala, M. Leskelä, Hannu Kattelus

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

4 Citations (Scopus)

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Physics & Astronomy