Reducing stiction in Microelectromechanical Systems by nanometer-scale films grown by atomic layer deposition
- Riikka Puurunen
- , Ari Häärä
- , Heini Ritala
- , James R. Dekker
- , Markku Kainlauri
- , Harri Pohjonen
- , Tommi Suni
- , Jyrki Kiihamäki
- , E. Santala
- , M. Leskelä
- , Hannu Kattelus
- University of Helsinki
Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
5
Link opens in a new tab
Citations
(Scopus)