Reducing stiction in microelectromechanical systems by rough nanometer-scale films grown by atomic layer deposition

Riikka Puurunen (Corresponding Author), Ari Häärä, Heini Saloniemi, James Dekker, Markku Kainlauri, Harri Pohjonen, Tommi Suni, Jyrki Kiihamäki, E. Santala, M. Leskelä, Hannu Kattelus

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