Skip to main navigation Skip to search Skip to main content

Reducing the Effect of Parasitic Capacitance on MEMS Measurements

  • Pekka Rantakari
  • , Jyrki Kiihamäki
  • , Mika Koskenvuori
  • , Tuomas Lamminmäki
  • , Ilkka Tittonen
    • Helsinki University of Technology

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    Fingerprint

    Dive into the research topics of 'Reducing the Effect of Parasitic Capacitance on MEMS Measurements'. Together they form a unique fingerprint.
    Sort by

    Keyphrases

    Engineering

    INIS

    Material Science