Reduction of the thermal conductivity in free-standing silicon nano-membranes investigated by non-invasive Raman thermometry

E Chavez-Angel, J S Reparaz, J Gomis-Bresco, M R Wagner, J Cuffe, B Graczykowski, Andrey Shchepetov, H Jiang, Mika Prunnila, Jouni Ahopelto, F Alzina, C M Sotomayor Torres (Corresponding Author)

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Abstract

We report on the reduction of the thermal conductivity in ultra-thin suspended Si membranes with high crystalline quality. A series of membranes with thicknesses ranging from 9 nm to 1.5 ìm was investigated using Raman thermometry, a novel contactless technique for thermal conductivity determination. A systematic decrease in the thermal conductivitywas observed as reducing the thickness, which is explained using the Fuchs-Sondheimer model through the influence of phonon boundary scattering at the surfaces. The thermal conductivity of the thinnest membrane with d = 9 nm resulted in (9 ± 2) W/mK, thus approaching the amorphous limit but still maintaining a high crystalline quality.
Original languageEnglish
JournalAPL Materials
Volume2
Issue number1
DOIs
Publication statusPublished - 2014
MoE publication typeA1 Journal article-refereed

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Silicon
Thermal conductivity
Membranes
Crystalline materials
Scattering

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Chavez-Angel, E., Reparaz, J. S., Gomis-Bresco, J., Wagner, M. R., Cuffe, J., Graczykowski, B., ... Sotomayor Torres, C. M. (2014). Reduction of the thermal conductivity in free-standing silicon nano-membranes investigated by non-invasive Raman thermometry. APL Materials, 2(1). https://doi.org/10.1063/1.4861796
Chavez-Angel, E ; Reparaz, J S ; Gomis-Bresco, J ; Wagner, M R ; Cuffe, J ; Graczykowski, B ; Shchepetov, Andrey ; Jiang, H ; Prunnila, Mika ; Ahopelto, Jouni ; Alzina, F ; Sotomayor Torres, C M. / Reduction of the thermal conductivity in free-standing silicon nano-membranes investigated by non-invasive Raman thermometry. In: APL Materials. 2014 ; Vol. 2, No. 1.
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title = "Reduction of the thermal conductivity in free-standing silicon nano-membranes investigated by non-invasive Raman thermometry",
abstract = "We report on the reduction of the thermal conductivity in ultra-thin suspended Si membranes with high crystalline quality. A series of membranes with thicknesses ranging from 9 nm to 1.5 {\`i}m was investigated using Raman thermometry, a novel contactless technique for thermal conductivity determination. A systematic decrease in the thermal conductivitywas observed as reducing the thickness, which is explained using the Fuchs-Sondheimer model through the influence of phonon boundary scattering at the surfaces. The thermal conductivity of the thinnest membrane with d = 9 nm resulted in (9 ± 2) W/mK, thus approaching the amorphous limit but still maintaining a high crystalline quality.",
author = "E Chavez-Angel and Reparaz, {J S} and J Gomis-Bresco and Wagner, {M R} and J Cuffe and B Graczykowski and Andrey Shchepetov and H Jiang and Mika Prunnila and Jouni Ahopelto and F Alzina and {Sotomayor Torres}, {C M}",
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language = "English",
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Chavez-Angel, E, Reparaz, JS, Gomis-Bresco, J, Wagner, MR, Cuffe, J, Graczykowski, B, Shchepetov, A, Jiang, H, Prunnila, M, Ahopelto, J, Alzina, F & Sotomayor Torres, CM 2014, 'Reduction of the thermal conductivity in free-standing silicon nano-membranes investigated by non-invasive Raman thermometry', APL Materials, vol. 2, no. 1. https://doi.org/10.1063/1.4861796

Reduction of the thermal conductivity in free-standing silicon nano-membranes investigated by non-invasive Raman thermometry. / Chavez-Angel, E; Reparaz, J S; Gomis-Bresco, J; Wagner, M R; Cuffe, J; Graczykowski, B; Shchepetov, Andrey; Jiang, H; Prunnila, Mika; Ahopelto, Jouni; Alzina, F; Sotomayor Torres, C M (Corresponding Author).

In: APL Materials, Vol. 2, No. 1, 2014.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Reduction of the thermal conductivity in free-standing silicon nano-membranes investigated by non-invasive Raman thermometry

AU - Chavez-Angel, E

AU - Reparaz, J S

AU - Gomis-Bresco, J

AU - Wagner, M R

AU - Cuffe, J

AU - Graczykowski, B

AU - Shchepetov, Andrey

AU - Jiang, H

AU - Prunnila, Mika

AU - Ahopelto, Jouni

AU - Alzina, F

AU - Sotomayor Torres, C M

PY - 2014

Y1 - 2014

N2 - We report on the reduction of the thermal conductivity in ultra-thin suspended Si membranes with high crystalline quality. A series of membranes with thicknesses ranging from 9 nm to 1.5 ìm was investigated using Raman thermometry, a novel contactless technique for thermal conductivity determination. A systematic decrease in the thermal conductivitywas observed as reducing the thickness, which is explained using the Fuchs-Sondheimer model through the influence of phonon boundary scattering at the surfaces. The thermal conductivity of the thinnest membrane with d = 9 nm resulted in (9 ± 2) W/mK, thus approaching the amorphous limit but still maintaining a high crystalline quality.

AB - We report on the reduction of the thermal conductivity in ultra-thin suspended Si membranes with high crystalline quality. A series of membranes with thicknesses ranging from 9 nm to 1.5 ìm was investigated using Raman thermometry, a novel contactless technique for thermal conductivity determination. A systematic decrease in the thermal conductivitywas observed as reducing the thickness, which is explained using the Fuchs-Sondheimer model through the influence of phonon boundary scattering at the surfaces. The thermal conductivity of the thinnest membrane with d = 9 nm resulted in (9 ± 2) W/mK, thus approaching the amorphous limit but still maintaining a high crystalline quality.

U2 - 10.1063/1.4861796

DO - 10.1063/1.4861796

M3 - Article

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JO - APL Materials

JF - APL Materials

SN - 2166-532X

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