Reduction of the thermal conductivity in free-standing silicon nano-membranes investigated by non-invasive Raman thermometry

E Chavez-Angel, J S Reparaz, J Gomis-Bresco, M R Wagner, J Cuffe, B Graczykowski, Andrey Shchepetov, H Jiang, Mika Prunnila, Jouni Ahopelto, F Alzina, C M Sotomayor Torres (Corresponding Author)

    Research output: Contribution to journalArticleScientificpeer-review

    99 Citations (Scopus)

    Abstract

    We report on the reduction of the thermal conductivity in ultra-thin suspended Si membranes with high crystalline quality. A series of membranes with thicknesses ranging from 9 nm to 1.5 ìm was investigated using Raman thermometry, a novel contactless technique for thermal conductivity determination. A systematic decrease in the thermal conductivitywas observed as reducing the thickness, which is explained using the Fuchs-Sondheimer model through the influence of phonon boundary scattering at the surfaces. The thermal conductivity of the thinnest membrane with d = 9 nm resulted in (9 ± 2) W/mK, thus approaching the amorphous limit but still maintaining a high crystalline quality.
    Original languageEnglish
    JournalAPL Materials
    Volume2
    Issue number1
    DOIs
    Publication statusPublished - 2014
    MoE publication typeA1 Journal article-refereed

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