Keyphrases
Epilayer
100%
Threading Dislocation Density
100%
In Situ
50%
Aluminum Gallium Nitride (AlGaN)
50%
Atomic Force Microscopy
25%
Surface Morphology
25%
Sapphire
25%
Crystallinity
25%
Film Growth
25%
Surface Diffusion
25%
Transmission Electron Microscopy
25%
Density Measurement
25%
X-ray Transmission
25%
Continuous Film
25%
Metal-organic Chemical Vapor Deposition (MOCVD)
25%
Al Species
25%
Nucleation Layer
25%
GaN Layers
25%
Threading Dislocation
25%
High-resolution X-ray Diffraction (HRXRD)
25%
Dislocation Reaction
25%
GaN Films
25%
Multistep Methods
25%
Etch pit Density
25%
Crack-free Layers
25%
MOCVD Growth
25%
Sparse Distribution
25%
Reflectometry
25%
Substrate Interface
25%
C-plane
25%
Nucleation Island
25%
INIS
density
100%
reduction
100%
dislocations
100%
gallium nitrides
100%
films
83%
layers
66%
growth
66%
surfaces
33%
chemical vapor deposition
33%
nucleation
33%
thickness
16%
interfaces
16%
stimulation
16%
morphology
16%
substrates
16%
atomic force microscopy
16%
distribution
16%
diffusion
16%
transmission electron microscopy
16%
islands
16%
resolution
16%
x-ray diffraction
16%
cracks
16%
pits
16%
sapphire
16%
Material Science
Epilayers
100%
Density
100%
Film
80%
Nucleation
40%
Surface Morphology
20%
Sapphire
20%
Surface Diffusion
20%
High Resolution X-Ray Diffraction
20%
Transmission Electron Microscopy
20%
Film Growth
20%
Engineering
Dislocation Density
100%
Threading Dislocation
100%
Substrate Interface
20%
Atomic Force Microscopy
20%
Ray Diffraction
20%
Surface Morphology
20%
High Resolution
20%
Crystallinity
20%