Refractive index behaviour of phosphorus-doped planar silica waveguides

Engineering & Materials Science

• Refractive index 100%
• Phosphorus 92%
• Silica 78%
• Waveguides 78%
• Annealing 45%
• Quartz 33%
• Low pressure chemical vapor deposition 24%
• Silicon 24%
• Substrates 21%
• Compressive stress 15%
• Temperature 6%

Physics & Astronomy

• phosphorus 74%
• silicon dioxide 58%
• refractivity 53%
• waveguides 50%
• annealing 27%
• quartz 26%
• silicon 16%
• homogeneity 14%
• inhomogeneity 12%
• low pressure 12%
• vapor deposition 11%

Chemical Compounds

• Refractive Index 73%
• Liquid Film 36%
• Annealing 36%
• Quartz 27%
• Phosphorus(.) 25%
• Low Pressure Chemical Vapour Deposition 22%
• Homogeneity 13%
• Reduction 6%