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Register mark measurement errors in high-precision roll-to-roll continuous systems: the effect of register mark geometry on measurement error

  • Jongsu Lee
  • , Pekka Isto
  • , Hakyung Jeong
  • , Janghoon Park
  • , Dongjin Lee
  • , Keehyun Shin*
    • *Corresponding author for this work

    Research output: Contribution to journal › Article › Scientific › peer-review

    16   Link opens in a new tab Citations (Scopus)

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