Register mark measurement errors in high-precision roll-to-roll continuous systems: the effect of register mark geometry on measurement error

Jongsu Lee, Pekka Isto, Hakyung Jeong, Janghoon Park, Dongjin Lee, Keehyun Shin (Corresponding Author)

    Research output: Contribution to journal › Article › Scientific › peer-review

    15 Citations (Scopus)

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