Replicated sol-gel stamps with metal backbone used for roll-to-roll manufacturing

Arne Schleunitz, C. Spreu, H. Schift, Tapio Mäkelä, Tomi Haatainen, Jouni Ahopelto, A. Klukowska

Research output: Contribution to conferenceConference articleScientificpeer-review

Abstract

The replicated sol-gel stamps used in this work were fabricated according to a process developed. As a substrate, thin Ni foils (250 ìm thickness) were used. The pattern was imprinted from an intermediate polycarbonate replica into an approx. 40 ìm thick Ormostamp® layer by UV-NIL. The metal shims were cut, wrapped around a 66 mm diameter metal cylinder and mechanically attached to the home-build roll-to-roll (R2R) embossing setup at VTT.
Original languageEnglish
Publication statusPublished - 2009
MoE publication typeNot Eligible
Event35th International Conference on Micro & Nano Engineering, MNE 2009 - Ghent, Belgium
Duration: 28 Sep 20091 Oct 2009

Conference

Conference35th International Conference on Micro & Nano Engineering, MNE 2009
CountryBelgium
CityGhent
Period28/09/091/10/09

Keywords

  • Nanoimprinting
  • roll-to-roll
  • UV roll-to-roll

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    Schleunitz, A., Spreu, C., Schift, H., Mäkelä, T., Haatainen, T., Ahopelto, J., & Klukowska, A. (2009). Replicated sol-gel stamps with metal backbone used for roll-to-roll manufacturing. Paper presented at 35th International Conference on Micro & Nano Engineering, MNE 2009, Ghent, Belgium.