Replicated sol-gel stamps with metal backbone used for roll-to-roll manufacturing

Arne Schleunitz, C. Spreu, H. Schift, Tapio Mäkelä, Tomi Haatainen, Jouni Ahopelto, A. Klukowska

Research output: Contribution to conferenceConference articleScientificpeer-review

Abstract

The replicated sol-gel stamps used in this work were fabricated according to a process developed. As a substrate, thin Ni foils (250 ìm thickness) were used. The pattern was imprinted from an intermediate polycarbonate replica into an approx. 40 ìm thick Ormostamp® layer by UV-NIL. The metal shims were cut, wrapped around a 66 mm diameter metal cylinder and mechanically attached to the home-build roll-to-roll (R2R) embossing setup at VTT.
Original languageEnglish
Publication statusPublished - 2009
MoE publication typeNot Eligible
Event35th International Conference on Micro & Nano Engineering, MNE 2009 - Ghent, Belgium
Duration: 28 Sep 20091 Oct 2009

Conference

Conference35th International Conference on Micro & Nano Engineering, MNE 2009
CountryBelgium
CityGhent
Period28/09/091/10/09

Fingerprint

polycarbonate
Sol-gels
Metals
Shims
Metal foil
Substrates

Keywords

  • Nanoimprinting
  • roll-to-roll
  • UV roll-to-roll

Cite this

Schleunitz, A., Spreu, C., Schift, H., Mäkelä, T., Haatainen, T., Ahopelto, J., & Klukowska, A. (2009). Replicated sol-gel stamps with metal backbone used for roll-to-roll manufacturing. Paper presented at 35th International Conference on Micro & Nano Engineering, MNE 2009, Ghent, Belgium.
Schleunitz, Arne ; Spreu, C. ; Schift, H. ; Mäkelä, Tapio ; Haatainen, Tomi ; Ahopelto, Jouni ; Klukowska, A. / Replicated sol-gel stamps with metal backbone used for roll-to-roll manufacturing. Paper presented at 35th International Conference on Micro & Nano Engineering, MNE 2009, Ghent, Belgium.
@conference{eeb73d9142c44e86940176b9e097cf50,
title = "Replicated sol-gel stamps with metal backbone used for roll-to-roll manufacturing",
abstract = "The replicated sol-gel stamps used in this work were fabricated according to a process developed. As a substrate, thin Ni foils (250 {\`i}m thickness) were used. The pattern was imprinted from an intermediate polycarbonate replica into an approx. 40 {\`i}m thick Ormostamp{\circledR} layer by UV-NIL. The metal shims were cut, wrapped around a 66 mm diameter metal cylinder and mechanically attached to the home-build roll-to-roll (R2R) embossing setup at VTT.",
keywords = "Nanoimprinting, roll-to-roll, UV roll-to-roll",
author = "Arne Schleunitz and C. Spreu and H. Schift and Tapio M{\"a}kel{\"a} and Tomi Haatainen and Jouni Ahopelto and A. Klukowska",
year = "2009",
language = "English",
note = "35th International Conference on Micro & Nano Engineering, MNE 2009 ; Conference date: 28-09-2009 Through 01-10-2009",

}

Schleunitz, A, Spreu, C, Schift, H, Mäkelä, T, Haatainen, T, Ahopelto, J & Klukowska, A 2009, 'Replicated sol-gel stamps with metal backbone used for roll-to-roll manufacturing' Paper presented at 35th International Conference on Micro & Nano Engineering, MNE 2009, Ghent, Belgium, 28/09/09 - 1/10/09, .

Replicated sol-gel stamps with metal backbone used for roll-to-roll manufacturing. / Schleunitz, Arne; Spreu, C.; Schift, H.; Mäkelä, Tapio; Haatainen, Tomi; Ahopelto, Jouni; Klukowska, A.

2009. Paper presented at 35th International Conference on Micro & Nano Engineering, MNE 2009, Ghent, Belgium.

Research output: Contribution to conferenceConference articleScientificpeer-review

TY - CONF

T1 - Replicated sol-gel stamps with metal backbone used for roll-to-roll manufacturing

AU - Schleunitz, Arne

AU - Spreu, C.

AU - Schift, H.

AU - Mäkelä, Tapio

AU - Haatainen, Tomi

AU - Ahopelto, Jouni

AU - Klukowska, A.

PY - 2009

Y1 - 2009

N2 - The replicated sol-gel stamps used in this work were fabricated according to a process developed. As a substrate, thin Ni foils (250 ìm thickness) were used. The pattern was imprinted from an intermediate polycarbonate replica into an approx. 40 ìm thick Ormostamp® layer by UV-NIL. The metal shims were cut, wrapped around a 66 mm diameter metal cylinder and mechanically attached to the home-build roll-to-roll (R2R) embossing setup at VTT.

AB - The replicated sol-gel stamps used in this work were fabricated according to a process developed. As a substrate, thin Ni foils (250 ìm thickness) were used. The pattern was imprinted from an intermediate polycarbonate replica into an approx. 40 ìm thick Ormostamp® layer by UV-NIL. The metal shims were cut, wrapped around a 66 mm diameter metal cylinder and mechanically attached to the home-build roll-to-roll (R2R) embossing setup at VTT.

KW - Nanoimprinting

KW - roll-to-roll

KW - UV roll-to-roll

M3 - Conference article

ER -

Schleunitz A, Spreu C, Schift H, Mäkelä T, Haatainen T, Ahopelto J et al. Replicated sol-gel stamps with metal backbone used for roll-to-roll manufacturing. 2009. Paper presented at 35th International Conference on Micro & Nano Engineering, MNE 2009, Ghent, Belgium.