Replicated sol-gel stamps with metal backbone used for roll-to-roll manufacturing

Arne Schleunitz; C. Spreu; H. Schift; Tapio Mäkelä; Tomi Haatainen; Jouni Ahopelto; A. Klukowska

Replicated sol-gel stamps with metal backbone used for roll-to-roll manufacturing

Arne Schleunitz, C. Spreu, H. Schift, Tapio Mäkelä, Tomi Haatainen, Jouni Ahopelto, A. Klukowska

Research output: Contribution to conference › Conference article › Scientific › peer-review

Abstract

The replicated sol-gel stamps used in this work were fabricated according to a process developed. As a substrate, thin Ni foils (250 ìm thickness) were used. The pattern was imprinted from an intermediate polycarbonate replica into an approx. 40 ìm thick Ormostamp® layer by UV-NIL. The metal shims were cut, wrapped around a 66 mm diameter metal cylinder and mechanically attached to the home-build roll-to-roll (R2R) embossing setup at VTT.

Original language	English
Publication status	Published - 2009
MoE publication type	Not Eligible
Event	35th International Conference on Micro & Nano Engineering, MNE 2009 - Ghent, Belgium Duration: 28 Sept 2009 → 1 Oct 2009

Conference

Conference	35th International Conference on Micro & Nano Engineering, MNE 2009
Country/Territory	Belgium
City	Ghent
Period	28/09/09 → 1/10/09

Keywords

Nanoimprinting
roll-to-roll
UV roll-to-roll

Cite this

@conference{eeb73d9142c44e86940176b9e097cf50,

title = "Replicated sol-gel stamps with metal backbone used for roll-to-roll manufacturing",

abstract = "The replicated sol-gel stamps used in this work were fabricated according to a process developed. As a substrate, thin Ni foils (250 {\`i}m thickness) were used. The pattern was imprinted from an intermediate polycarbonate replica into an approx. 40 {\`i}m thick Ormostamp{\textregistered} layer by UV-NIL. The metal shims were cut, wrapped around a 66 mm diameter metal cylinder and mechanically attached to the home-build roll-to-roll (R2R) embossing setup at VTT.",

keywords = "Nanoimprinting, roll-to-roll, UV roll-to-roll",

author = "Arne Schleunitz and C. Spreu and H. Schift and Tapio M{\"a}kel{\"a} and Tomi Haatainen and Jouni Ahopelto and A. Klukowska",

year = "2009",

language = "English",

note = "35th International Conference on Micro & Nano Engineering, MNE 2009 ; Conference date: 28-09-2009 Through 01-10-2009",

}

TY - CONF

T1 - Replicated sol-gel stamps with metal backbone used for roll-to-roll manufacturing

AU - Schleunitz, Arne

AU - Spreu, C.

AU - Schift, H.

AU - Mäkelä, Tapio

AU - Haatainen, Tomi

AU - Ahopelto, Jouni

AU - Klukowska, A.

PY - 2009

Y1 - 2009

N2 - The replicated sol-gel stamps used in this work were fabricated according to a process developed. As a substrate, thin Ni foils (250 ìm thickness) were used. The pattern was imprinted from an intermediate polycarbonate replica into an approx. 40 ìm thick Ormostamp® layer by UV-NIL. The metal shims were cut, wrapped around a 66 mm diameter metal cylinder and mechanically attached to the home-build roll-to-roll (R2R) embossing setup at VTT.

AB - The replicated sol-gel stamps used in this work were fabricated according to a process developed. As a substrate, thin Ni foils (250 ìm thickness) were used. The pattern was imprinted from an intermediate polycarbonate replica into an approx. 40 ìm thick Ormostamp® layer by UV-NIL. The metal shims were cut, wrapped around a 66 mm diameter metal cylinder and mechanically attached to the home-build roll-to-roll (R2R) embossing setup at VTT.

KW - Nanoimprinting

KW - roll-to-roll

KW - UV roll-to-roll

M3 - Conference article

T2 - 35th International Conference on Micro & Nano Engineering, MNE 2009

Y2 - 28 September 2009 through 1 October 2009

ER -

Replicated sol-gel stamps with metal backbone used for roll-to-roll manufacturing

Abstract

Conference

Keywords

Fingerprint

Cite this