The replicated sol-gel stamps used in this work were fabricated according to a process developed. As a substrate, thin Ni foils (250 ìm thickness) were used. The pattern was imprinted from an intermediate polycarbonate replica into an approx. 40 ìm thick Ormostamp® layer by UV-NIL. The metal shims were cut, wrapped around a 66 mm diameter metal cylinder and mechanically attached to the home-build roll-to-roll (R2R) embossing setup at VTT.
|Publication status||Published - 2009|
|MoE publication type||Not Eligible|
|Event||35th International Conference on Micro & Nano Engineering, MNE 2009 - Ghent, Belgium|
Duration: 28 Sep 2009 → 1 Oct 2009
|Conference||35th International Conference on Micro & Nano Engineering, MNE 2009|
|Period||28/09/09 → 1/10/09|
- UV roll-to-roll