Research and development environment for micromodule technology at VTT electronics

Tero Majamaa, Jyrki Ollila, Timo Salo

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

Original language	English
Title of host publication	34th R3-Nordic Contamination Control Symposium
Place of Publication	Espoo
Publisher	VTT Technical Research Centre of Finland
Pages	311-320
ISBN (Electronic)	951-38-6285-2
ISBN (Print)	951-38-6284-4
Publication status	Published - 2003
MoE publication type	B3 Non-refereed article in conference proceedings
Event	34th R3-Nordic Contamination Control Symposium - Turku, Finland Duration: 2 Jun 2003 → 4 Jun 2003

Conference	34th R3-Nordic Contamination Control Symposium
Country/Territory	Finland
City	Turku
Period	2/06/03 → 4/06/03

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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title = "Research and development environment for micromodule technology at VTT electronics",

author = "Tero Majamaa and Jyrki Ollila and Timo Salo",

year = "2003",

language = "English",

isbn = "951-38-6284-4",

series = "VTT Symposium",

publisher = "VTT Technical Research Centre of Finland",

number = "229",

pages = "311--320",

booktitle = "34th R3-Nordic Contamination Control Symposium",

address = "Finland",

note = "34th R3-Nordic Contamination Control Symposium ; Conference date: 02-06-2003 Through 04-06-2003",

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Majamaa, T, Ollila, J & Salo, T 2003, Research and development environment for micromodule technology at VTT electronics. in 34th R3-Nordic Contamination Control Symposium. VTT Technical Research Centre of Finland, Espoo, VTT Symposium, no. 229, pp. 311-320, 34th R3-Nordic Contamination Control Symposium, Turku, Finland, 2/06/03. <https://publications.vtt.fi/pdf/symposiums/2003/S229.pdf>

Research and development environment for micromodule technology at VTT electronics. / Majamaa, Tero; Ollila, Jyrki; Salo, Timo.
34th R3-Nordic Contamination Control Symposium. Espoo: VTT Technical Research Centre of Finland, 2003. p. 311-320 (VTT Symposium; No. 229).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

TY - GEN

T1 - Research and development environment for micromodule technology at VTT electronics

AU - Majamaa, Tero

AU - Ollila, Jyrki

AU - Salo, Timo

PY - 2003

Y1 - 2003

M3 - Conference article in proceedings

SN - 951-38-6284-4

T3 - VTT Symposium

SP - 311

EP - 320

BT - 34th R3-Nordic Contamination Control Symposium

PB - VTT Technical Research Centre of Finland

CY - Espoo

T2 - 34th R3-Nordic Contamination Control Symposium

Y2 - 2 June 2003 through 4 June 2003

ER -