Research and development environment for micromodule technology at VTT electronics

Tero Majamaa, Jyrki Ollila, Timo Salo

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

    Original languageEnglish
    Title of host publication34th R3-Nordic Contamination Control Symposium
    Place of PublicationEspoo
    PublisherVTT Technical Research Centre of Finland
    Pages311-320
    ISBN (Electronic)951-38-6285-2
    ISBN (Print)951-38-6284-4
    Publication statusPublished - 2003
    MoE publication typeB3 Non-refereed article in conference proceedings
    Event34th R3-Nordic Contamination Control Symposium - Turku, Finland
    Duration: 2 Jun 20034 Jun 2003

    Publication series

    SeriesVTT Symposium
    Number229
    ISSN0357-9387

    Conference

    Conference34th R3-Nordic Contamination Control Symposium
    CountryFinland
    CityTurku
    Period2/06/034/06/03

    Cite this

    Majamaa, T., Ollila, J., & Salo, T. (2003). Research and development environment for micromodule technology at VTT electronics. In 34th R3-Nordic Contamination Control Symposium (pp. 311-320). VTT Technical Research Centre of Finland. VTT Symposium, No. 229 https://www.vtt.fi/inf/pdf/symposiums/2003/S229.pdf