Residual stresses in atomic layer-deposited tantalum oxide thin films

Emma Härkönen (Corresponding author), Oili Ylivaara, Riikka L. Puurunen, Mikko J. Heikkilä, Mikko Ritala

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    Original languageEnglish
    Title of host publicationBALD2014 Abstract book
    Publication statusPublished - 2014
    Event12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014 - Helsinki, Finland
    Duration: 12 May 201413 May 2014
    Conference number: 12
    http://www.aldcoe.fi/bald2014/program.pdf (Program)
    http://www.aldcoe.fi/bald2014/posters.pdf (Posters)

    Conference

    Conference12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014
    Abbreviated titleBaltic ALD 2014
    CountryFinland
    CityHelsinki
    Period12/05/1413/05/14
    OtherAbstracts reviewed and published.
    Internet address

    Cite this

    Härkönen, E., Ylivaara, O., Puurunen, R. L., Heikkilä, M. J., & Ritala, M. (2014). Residual stresses in atomic layer-deposited tantalum oxide thin films. In BALD2014 Abstract book
    Härkönen, Emma ; Ylivaara, Oili ; Puurunen, Riikka L. ; Heikkilä, Mikko J. ; Ritala, Mikko. / Residual stresses in atomic layer-deposited tantalum oxide thin films. BALD2014 Abstract book. 2014.
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    title = "Residual stresses in atomic layer-deposited tantalum oxide thin films",
    author = "Emma H{\"a}rk{\"o}nen and Oili Ylivaara and Puurunen, {Riikka L.} and Heikkil{\"a}, {Mikko J.} and Mikko Ritala",
    note = "Published abstract of a poster presentation Project 74717 MECHALD & 102086 ALDCoE",
    year = "2014",
    language = "English",
    booktitle = "BALD2014 Abstract book",

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    Härkönen, E, Ylivaara, O, Puurunen, RL, Heikkilä, MJ & Ritala, M 2014, Residual stresses in atomic layer-deposited tantalum oxide thin films. in BALD2014 Abstract book. 12th International Baltic Conference on Atomic Layer Deposition, Baltic ALD 2014, Helsinki, Finland, 12/05/14.

    Residual stresses in atomic layer-deposited tantalum oxide thin films. / Härkönen, Emma (Corresponding author); Ylivaara, Oili; Puurunen, Riikka L.; Heikkilä, Mikko J.; Ritala, Mikko.

    BALD2014 Abstract book. 2014.

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    TY - CHAP

    T1 - Residual stresses in atomic layer-deposited tantalum oxide thin films

    AU - Härkönen, Emma

    AU - Ylivaara, Oili

    AU - Puurunen, Riikka L.

    AU - Heikkilä, Mikko J.

    AU - Ritala, Mikko

    N1 - Published abstract of a poster presentation Project 74717 MECHALD & 102086 ALDCoE

    PY - 2014

    Y1 - 2014

    M3 - Conference abstract in proceedings

    BT - BALD2014 Abstract book

    ER -

    Härkönen E, Ylivaara O, Puurunen RL, Heikkilä MJ, Ritala M. Residual stresses in atomic layer-deposited tantalum oxide thin films. In BALD2014 Abstract book. 2014