Abstract
| Original language | English |
|---|---|
| Number of pages | 12 |
| Journal | Journal of Micro/ Nanolithography, MEMS, and MOEMS |
| Volume | 13 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 2014 |
| MoE publication type | A1 Journal article-refereed |
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Keywords
- lidar
- microelectromechanical systems
- mirrors
- opticaldevices
- scanners
- scanning
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Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning. / Hofmann, U. (Corresponding Author); Aikio, Mika; Janes, J.; Senger, F.; Stenchly, V.; Hagge, J.; Quenzer, H.-J.; Weiss, M.; Von Wantoch, T.; Mallas, C.; Wagner, B.; Benecke, W.
In: Journal of Micro/ Nanolithography, MEMS, and MOEMS, Vol. 13, No. 1, 2014.Research output: Contribution to journal › Article › Scientific › peer-review
TY - JOUR
T1 - Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning
AU - Hofmann, U.
AU - Aikio, Mika
AU - Janes, J.
AU - Senger, F.
AU - Stenchly, V.
AU - Hagge, J.
AU - Quenzer, H.-J.
AU - Weiss, M.
AU - Von Wantoch, T.
AU - Mallas, C.
AU - Wagner, B.
AU - Benecke, W.
PY - 2014
Y1 - 2014
N2 - Low-cost automotive laser scanners for environmental perception are needed to enable the integration of advanced driver assistant systems into all automotive vehicle segments, which is a key to reduce the number of traffic accidents on roads. Within the scope of the Europeanfunded project MiniFaros, partners from five different countries have been cooperating in developing a small-sized low-cost time-of-flight-based range sensor. An omnidirectional 360-deg laser scanning concept has been developed based on the combination of an omnidirectional lens and a biaxial large aperture MEMS mirror. The concept, design, fabrication, and first measurement results of a resonant biaxial 7-mm gimbal-less MEMS mirror that is electrostatically actuated by stacked vertical comb drives is described. Identical resonant frequencies of the two orthogonal axes are necessary to enable the required circle scanning capability. A tripod suspension was chosen, since it minimizes the frequency splitting of the two resonant axes. Low-mirror curvature is achieved by a thickness of the mirror of more than 500 ìm. Hermetic wafer-level vacuum packaging of such large mirrors based on multiple wafer bonding has been developed to enable a large mechanical tilt angle of 6.5 deg in each axis. Due to the large targeted tilt angle of 15 deg and because of the MEMS mirror actuator having a diameter of 10 mm, a cavity depth of about 1.6 mm has been realized.
AB - Low-cost automotive laser scanners for environmental perception are needed to enable the integration of advanced driver assistant systems into all automotive vehicle segments, which is a key to reduce the number of traffic accidents on roads. Within the scope of the Europeanfunded project MiniFaros, partners from five different countries have been cooperating in developing a small-sized low-cost time-of-flight-based range sensor. An omnidirectional 360-deg laser scanning concept has been developed based on the combination of an omnidirectional lens and a biaxial large aperture MEMS mirror. The concept, design, fabrication, and first measurement results of a resonant biaxial 7-mm gimbal-less MEMS mirror that is electrostatically actuated by stacked vertical comb drives is described. Identical resonant frequencies of the two orthogonal axes are necessary to enable the required circle scanning capability. A tripod suspension was chosen, since it minimizes the frequency splitting of the two resonant axes. Low-mirror curvature is achieved by a thickness of the mirror of more than 500 ìm. Hermetic wafer-level vacuum packaging of such large mirrors based on multiple wafer bonding has been developed to enable a large mechanical tilt angle of 6.5 deg in each axis. Due to the large targeted tilt angle of 15 deg and because of the MEMS mirror actuator having a diameter of 10 mm, a cavity depth of about 1.6 mm has been realized.
KW - lidar
KW - microelectromechanical systems
KW - mirrors
KW - opticaldevices
KW - scanners
KW - scanning
U2 - 10.1117/1.JMM.13.1.011103
DO - 10.1117/1.JMM.13.1.011103
M3 - Article
VL - 13
JO - Journal of Micro/ Nanolithography, MEMS, and MOEMS
JF - Journal of Micro/ Nanolithography, MEMS, and MOEMS
SN - 1932-5150
IS - 1
ER -