Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning

U. Hofmann (Corresponding Author), Mika Aikio, J. Janes, F. Senger, V. Stenchly, J. Hagge, H.-J. Quenzer, M. Weiss, T. Von Wantoch, C. Mallas, B. Wagner, W. Benecke

Research output: Contribution to journalArticleScientificpeer-review

17 Citations (Scopus)

Abstract

Low-cost automotive laser scanners for environmental perception are needed to enable the integration of advanced driver assistant systems into all automotive vehicle segments, which is a key to reduce the number of traffic accidents on roads. Within the scope of the Europeanfunded project MiniFaros, partners from five different countries have been cooperating in developing a small-sized low-cost time-of-flight-based range sensor. An omnidirectional 360-deg laser scanning concept has been developed based on the combination of an omnidirectional lens and a biaxial large aperture MEMS mirror. The concept, design, fabrication, and first measurement results of a resonant biaxial 7-mm gimbal-less MEMS mirror that is electrostatically actuated by stacked vertical comb drives is described. Identical resonant frequencies of the two orthogonal axes are necessary to enable the required circle scanning capability. A tripod suspension was chosen, since it minimizes the frequency splitting of the two resonant axes. Low-mirror curvature is achieved by a thickness of the mirror of more than 500 ìm. Hermetic wafer-level vacuum packaging of such large mirrors based on multiple wafer bonding has been developed to enable a large mechanical tilt angle of 6.5 deg in each axis. Due to the large targeted tilt angle of 15 deg and because of the MEMS mirror actuator having a diameter of 10 mm, a cavity depth of about 1.6 mm has been realized.
Original languageEnglish
Number of pages12
JournalJournal of Micro/ Nanolithography, MEMS, and MOEMS
Volume13
Issue number1
DOIs
Publication statusPublished - 2014
MoE publication typeA1 Journal article-refereed

Fingerprint

microelectromechanical systems
MEMS
Mirrors
mirrors
Scanning
scanning
Wafer bonding
wafers
Highway accidents
Lasers
gimbals
tripods
Costs
accidents
Lenses
Natural frequencies
Suspensions
Packaging
roads
packaging

Keywords

  • lidar
  • microelectromechanical systems
  • mirrors
  • opticaldevices
  • scanners
  • scanning

Cite this

Hofmann, U., Aikio, M., Janes, J., Senger, F., Stenchly, V., Hagge, J., ... Benecke, W. (2014). Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning. Journal of Micro/ Nanolithography, MEMS, and MOEMS, 13(1). https://doi.org/10.1117/1.JMM.13.1.011103
Hofmann, U. ; Aikio, Mika ; Janes, J. ; Senger, F. ; Stenchly, V. ; Hagge, J. ; Quenzer, H.-J. ; Weiss, M. ; Von Wantoch, T. ; Mallas, C. ; Wagner, B. ; Benecke, W. / Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning. In: Journal of Micro/ Nanolithography, MEMS, and MOEMS. 2014 ; Vol. 13, No. 1.
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abstract = "Low-cost automotive laser scanners for environmental perception are needed to enable the integration of advanced driver assistant systems into all automotive vehicle segments, which is a key to reduce the number of traffic accidents on roads. Within the scope of the Europeanfunded project MiniFaros, partners from five different countries have been cooperating in developing a small-sized low-cost time-of-flight-based range sensor. An omnidirectional 360-deg laser scanning concept has been developed based on the combination of an omnidirectional lens and a biaxial large aperture MEMS mirror. The concept, design, fabrication, and first measurement results of a resonant biaxial 7-mm gimbal-less MEMS mirror that is electrostatically actuated by stacked vertical comb drives is described. Identical resonant frequencies of the two orthogonal axes are necessary to enable the required circle scanning capability. A tripod suspension was chosen, since it minimizes the frequency splitting of the two resonant axes. Low-mirror curvature is achieved by a thickness of the mirror of more than 500 {\`i}m. Hermetic wafer-level vacuum packaging of such large mirrors based on multiple wafer bonding has been developed to enable a large mechanical tilt angle of 6.5 deg in each axis. Due to the large targeted tilt angle of 15 deg and because of the MEMS mirror actuator having a diameter of 10 mm, a cavity depth of about 1.6 mm has been realized.",
keywords = "lidar, microelectromechanical systems, mirrors, opticaldevices, scanners, scanning",
author = "U. Hofmann and Mika Aikio and J. Janes and F. Senger and V. Stenchly and J. Hagge and H.-J. Quenzer and M. Weiss and {Von Wantoch}, T. and C. Mallas and B. Wagner and W. Benecke",
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Hofmann, U, Aikio, M, Janes, J, Senger, F, Stenchly, V, Hagge, J, Quenzer, H-J, Weiss, M, Von Wantoch, T, Mallas, C, Wagner, B & Benecke, W 2014, 'Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning', Journal of Micro/ Nanolithography, MEMS, and MOEMS, vol. 13, no. 1. https://doi.org/10.1117/1.JMM.13.1.011103

Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning. / Hofmann, U. (Corresponding Author); Aikio, Mika; Janes, J.; Senger, F.; Stenchly, V.; Hagge, J.; Quenzer, H.-J.; Weiss, M.; Von Wantoch, T.; Mallas, C.; Wagner, B.; Benecke, W.

In: Journal of Micro/ Nanolithography, MEMS, and MOEMS, Vol. 13, No. 1, 2014.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning

AU - Hofmann, U.

AU - Aikio, Mika

AU - Janes, J.

AU - Senger, F.

AU - Stenchly, V.

AU - Hagge, J.

AU - Quenzer, H.-J.

AU - Weiss, M.

AU - Von Wantoch, T.

AU - Mallas, C.

AU - Wagner, B.

AU - Benecke, W.

PY - 2014

Y1 - 2014

N2 - Low-cost automotive laser scanners for environmental perception are needed to enable the integration of advanced driver assistant systems into all automotive vehicle segments, which is a key to reduce the number of traffic accidents on roads. Within the scope of the Europeanfunded project MiniFaros, partners from five different countries have been cooperating in developing a small-sized low-cost time-of-flight-based range sensor. An omnidirectional 360-deg laser scanning concept has been developed based on the combination of an omnidirectional lens and a biaxial large aperture MEMS mirror. The concept, design, fabrication, and first measurement results of a resonant biaxial 7-mm gimbal-less MEMS mirror that is electrostatically actuated by stacked vertical comb drives is described. Identical resonant frequencies of the two orthogonal axes are necessary to enable the required circle scanning capability. A tripod suspension was chosen, since it minimizes the frequency splitting of the two resonant axes. Low-mirror curvature is achieved by a thickness of the mirror of more than 500 ìm. Hermetic wafer-level vacuum packaging of such large mirrors based on multiple wafer bonding has been developed to enable a large mechanical tilt angle of 6.5 deg in each axis. Due to the large targeted tilt angle of 15 deg and because of the MEMS mirror actuator having a diameter of 10 mm, a cavity depth of about 1.6 mm has been realized.

AB - Low-cost automotive laser scanners for environmental perception are needed to enable the integration of advanced driver assistant systems into all automotive vehicle segments, which is a key to reduce the number of traffic accidents on roads. Within the scope of the Europeanfunded project MiniFaros, partners from five different countries have been cooperating in developing a small-sized low-cost time-of-flight-based range sensor. An omnidirectional 360-deg laser scanning concept has been developed based on the combination of an omnidirectional lens and a biaxial large aperture MEMS mirror. The concept, design, fabrication, and first measurement results of a resonant biaxial 7-mm gimbal-less MEMS mirror that is electrostatically actuated by stacked vertical comb drives is described. Identical resonant frequencies of the two orthogonal axes are necessary to enable the required circle scanning capability. A tripod suspension was chosen, since it minimizes the frequency splitting of the two resonant axes. Low-mirror curvature is achieved by a thickness of the mirror of more than 500 ìm. Hermetic wafer-level vacuum packaging of such large mirrors based on multiple wafer bonding has been developed to enable a large mechanical tilt angle of 6.5 deg in each axis. Due to the large targeted tilt angle of 15 deg and because of the MEMS mirror actuator having a diameter of 10 mm, a cavity depth of about 1.6 mm has been realized.

KW - lidar

KW - microelectromechanical systems

KW - mirrors

KW - opticaldevices

KW - scanners

KW - scanning

U2 - 10.1117/1.JMM.13.1.011103

DO - 10.1117/1.JMM.13.1.011103

M3 - Article

VL - 13

JO - Journal of Micro/ Nanolithography, MEMS, and MOEMS

JF - Journal of Micro/ Nanolithography, MEMS, and MOEMS

SN - 1932-5150

IS - 1

ER -