Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning

U. Hofmann, M. Aikio, J. Janes, F. Senger, V. Stenchly, M. Wiess, H.-J. Quenzer, B. Wagner, W. Benecke

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

Low-cost automotive laser scanners for environment perception are needed to enable the integration of advanced driver assistant systems (ADAS) into all automotive vehicle segments, a key to reducing the number of traffic accidents on roads. An omnidirectional 360 degree laser scanning concept has been developed based on combination of an omnidirectional lens and a biaxial large aperture MEMS mirror. This omnidirectional scanning concept is the core of a small sized low-cost time-of-flight based range sensor development. This paper describes concept, design, fabrication and first measurement results of a resonant biaxial 7mm gimbal-less MEMS mirror that is electrostatically actuated by stacked vertical comb drives. Identical frequencies of the two resonant axes are necessary to enable the required circle scanning capability. A tripod suspension was chosen since it allows minimizing the frequency splitting of the two resonant axes. Low mirror curvature is achieved by a thickness of the mirror of more than 500 µm. Hermetic wafer level vacuum packaging of such large mirrors based on multiple wafer bonding has been developed to enable to achieve a large mechanical tilt angle of +/- 6.5 degrees in each axis. The 7mm-MEMS mirror demonstrates large angle circular scanning at 1.5kHz.
Original languageEnglish
Title of host publicationMOEMS and Miniaturized Systems XII
EditorsWibool Piyawattanametha, Yong-Hwa Park
PublisherInternational Society for Optics and Photonics SPIE
ISBN (Print)978-081949385-9
DOIs
Publication statusPublished - 2013
MoE publication typeNot Eligible
EventSPIE MOEMS-MEMS - San Francisco, CA, United States
Duration: 2 Feb 20137 Feb 2013

Publication series

NameProceedings of SPIE
PublisherSPIE
Volume8616
ISSN (Print)0277-786X

Conference

ConferenceSPIE MOEMS-MEMS
CountryUnited States
CitySan Francisco, CA
Period2/02/137/02/13

Fingerprint

MEMS
Mirrors
Scanning
Wafer bonding
Highway accidents
Lasers
Costs
Lenses
Packaging
Vacuum
Fabrication
Sensors

Keywords

  • laser range sensor
  • level package
  • MEMS mirror
  • omnidirectional scanning
  • tripod
  • vacuum wafer

Cite this

Hofmann, U., Aikio, M., Janes, J., Senger, F., Stenchly, V., Wiess, M., ... Benecke, W. (2013). Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning. In W. Piyawattanametha, & Y-H. Park (Eds.), MOEMS and Miniaturized Systems XII [86160C] International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 8616 https://doi.org/10.1117/12.2006189
Hofmann, U. ; Aikio, M. ; Janes, J. ; Senger, F. ; Stenchly, V. ; Wiess, M. ; Quenzer, H.-J. ; Wagner, B. ; Benecke, W. / Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning. MOEMS and Miniaturized Systems XII. editor / Wibool Piyawattanametha ; Yong-Hwa Park. International Society for Optics and Photonics SPIE, 2013. (Proceedings of SPIE, Vol. 8616).
@inproceedings{1286d8d63b1f486a8c33c9f8f634ac0e,
title = "Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning",
abstract = "Low-cost automotive laser scanners for environment perception are needed to enable the integration of advanced driver assistant systems (ADAS) into all automotive vehicle segments, a key to reducing the number of traffic accidents on roads. An omnidirectional 360 degree laser scanning concept has been developed based on combination of an omnidirectional lens and a biaxial large aperture MEMS mirror. This omnidirectional scanning concept is the core of a small sized low-cost time-of-flight based range sensor development. This paper describes concept, design, fabrication and first measurement results of a resonant biaxial 7mm gimbal-less MEMS mirror that is electrostatically actuated by stacked vertical comb drives. Identical frequencies of the two resonant axes are necessary to enable the required circle scanning capability. A tripod suspension was chosen since it allows minimizing the frequency splitting of the two resonant axes. Low mirror curvature is achieved by a thickness of the mirror of more than 500 µm. Hermetic wafer level vacuum packaging of such large mirrors based on multiple wafer bonding has been developed to enable to achieve a large mechanical tilt angle of +/- 6.5 degrees in each axis. The 7mm-MEMS mirror demonstrates large angle circular scanning at 1.5kHz.",
keywords = "laser range sensor, level package, MEMS mirror, omnidirectional scanning, tripod, vacuum wafer",
author = "U. Hofmann and M. Aikio and J. Janes and F. Senger and V. Stenchly and M. Wiess and H.-J. Quenzer and B. Wagner and W. Benecke",
year = "2013",
doi = "10.1117/12.2006189",
language = "English",
isbn = "978-081949385-9",
series = "Proceedings of SPIE",
publisher = "International Society for Optics and Photonics SPIE",
editor = "Piyawattanametha, {Wibool } and Park, {Yong-Hwa }",
booktitle = "MOEMS and Miniaturized Systems XII",
address = "United States",

}

Hofmann, U, Aikio, M, Janes, J, Senger, F, Stenchly, V, Wiess, M, Quenzer, H-J, Wagner, B & Benecke, W 2013, Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning. in W Piyawattanametha & Y-H Park (eds), MOEMS and Miniaturized Systems XII., 86160C, International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 8616, SPIE MOEMS-MEMS, San Francisco, CA, United States, 2/02/13. https://doi.org/10.1117/12.2006189

Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning. / Hofmann, U.; Aikio, M.; Janes, J.; Senger, F.; Stenchly, V.; Wiess, M.; Quenzer, H.-J.; Wagner, B.; Benecke, W.

MOEMS and Miniaturized Systems XII. ed. / Wibool Piyawattanametha; Yong-Hwa Park. International Society for Optics and Photonics SPIE, 2013. 86160C (Proceedings of SPIE, Vol. 8616).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning

AU - Hofmann, U.

AU - Aikio, M.

AU - Janes, J.

AU - Senger, F.

AU - Stenchly, V.

AU - Wiess, M.

AU - Quenzer, H.-J.

AU - Wagner, B.

AU - Benecke, W.

PY - 2013

Y1 - 2013

N2 - Low-cost automotive laser scanners for environment perception are needed to enable the integration of advanced driver assistant systems (ADAS) into all automotive vehicle segments, a key to reducing the number of traffic accidents on roads. An omnidirectional 360 degree laser scanning concept has been developed based on combination of an omnidirectional lens and a biaxial large aperture MEMS mirror. This omnidirectional scanning concept is the core of a small sized low-cost time-of-flight based range sensor development. This paper describes concept, design, fabrication and first measurement results of a resonant biaxial 7mm gimbal-less MEMS mirror that is electrostatically actuated by stacked vertical comb drives. Identical frequencies of the two resonant axes are necessary to enable the required circle scanning capability. A tripod suspension was chosen since it allows minimizing the frequency splitting of the two resonant axes. Low mirror curvature is achieved by a thickness of the mirror of more than 500 µm. Hermetic wafer level vacuum packaging of such large mirrors based on multiple wafer bonding has been developed to enable to achieve a large mechanical tilt angle of +/- 6.5 degrees in each axis. The 7mm-MEMS mirror demonstrates large angle circular scanning at 1.5kHz.

AB - Low-cost automotive laser scanners for environment perception are needed to enable the integration of advanced driver assistant systems (ADAS) into all automotive vehicle segments, a key to reducing the number of traffic accidents on roads. An omnidirectional 360 degree laser scanning concept has been developed based on combination of an omnidirectional lens and a biaxial large aperture MEMS mirror. This omnidirectional scanning concept is the core of a small sized low-cost time-of-flight based range sensor development. This paper describes concept, design, fabrication and first measurement results of a resonant biaxial 7mm gimbal-less MEMS mirror that is electrostatically actuated by stacked vertical comb drives. Identical frequencies of the two resonant axes are necessary to enable the required circle scanning capability. A tripod suspension was chosen since it allows minimizing the frequency splitting of the two resonant axes. Low mirror curvature is achieved by a thickness of the mirror of more than 500 µm. Hermetic wafer level vacuum packaging of such large mirrors based on multiple wafer bonding has been developed to enable to achieve a large mechanical tilt angle of +/- 6.5 degrees in each axis. The 7mm-MEMS mirror demonstrates large angle circular scanning at 1.5kHz.

KW - laser range sensor

KW - level package

KW - MEMS mirror

KW - omnidirectional scanning

KW - tripod

KW - vacuum wafer

U2 - 10.1117/12.2006189

DO - 10.1117/12.2006189

M3 - Conference article in proceedings

SN - 978-081949385-9

T3 - Proceedings of SPIE

BT - MOEMS and Miniaturized Systems XII

A2 - Piyawattanametha, Wibool

A2 - Park, Yong-Hwa

PB - International Society for Optics and Photonics SPIE

ER -

Hofmann U, Aikio M, Janes J, Senger F, Stenchly V, Wiess M et al. Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning. In Piyawattanametha W, Park Y-H, editors, MOEMS and Miniaturized Systems XII. International Society for Optics and Photonics SPIE. 2013. 86160C. (Proceedings of SPIE, Vol. 8616). https://doi.org/10.1117/12.2006189