Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning

U. Hofmann, Mauri Aikio, J. Janes, F. Senger, V. Stenchly, M. Wiess, H.-J. Quenzer, B. Wagner, W. Benecke

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2 Citations (Scopus)

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