Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning

U. Hofmann, M. Aikio, J. Janes, F. Senger, V. Stenchly, M. Wiess, H.-J. Quenzer, B. Wagner, W. Benecke

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

1 Citation (Scopus)

Fingerprint

Dive into the research topics of 'Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning'. Together they form a unique fingerprint.

Engineering & Materials Science