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Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning
U. Hofmann, M. Aikio, J. Janes, F. Senger, V. Stenchly, M. Wiess, H.-J. Quenzer, B. Wagner, W. Benecke
Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
1
Citation
(Scopus)