Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning

  • U. Hofmann
  • , Mauri Aikio
  • , J. Janes
  • , F. Senger
  • , V. Stenchly
  • , M. Wiess
  • , H.-J. Quenzer
  • , B. Wagner
  • , W. Benecke

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

1 Citation (Scopus)

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