Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning

U. Hofmann (Corresponding Author), Mika Aikio, J. Janes, F. Senger, V. Stenchly, J. Hagge, H.-J. Quenzer, M. Weiss, T. Von Wantoch, C. Mallas, B. Wagner, W. Benecke

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