Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning
- U. Hofmann*
- , Mika Aikio
- , J. Janes
- , F. Senger
- , V. Stenchly
- , J. Hagge
- , H.-J. Quenzer
- , M. Weiss
- , T. Von Wantoch
- , C. Mallas
- , B. Wagner
- , W. Benecke
*Corresponding author for this work
Research output: Contribution to journal › Article › Scientific › peer-review
49
Link opens in a new tab
Citations
(Scopus)