Resonant micromirror with symmetrical AIN thin film actuators: Invited paper

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review


Micro-Opto-Electro-Mechanical resonant micromirror featuring a 4 mm aperture for laser-based measurement is presented. The MOEMS-mirror is fabricated on an SOI-wafer with piezoelectric actuators based on aluminium nitride thin films and packaged in a vacuum for a high-efficiency operation. The design of the device features four symmetrical co-radial beam structures, where each beam structure incorporates discrete piezoelectric elements for actuation and sensing. The integrated sensing element provides an accurate and real-time feedback signal for the control system, as it is directly mechanically coupled to the source of movement. Symmetrical design allows the mirror to be excited in the desired mode by modifying the frequency and phase on each of the driving actuators. For the laser measurement applications driving the mirror opposite actuators in opposite polarity and perpendicular axis with different frequencies, creates up to a 40-degree field of view Lissajous scanning pattern. The amplitude of the resonance is strongly affected by the Duffing-type nonlinearity and the derivative of the amplitude vs. frequency curve is small, allowing relatively large changes of frequencies without affecting the amplitude. Phe presented digital control method allows adjustment of frequencies via a phase accumulator to control Lissajous pattern parameters: ratio, phase and amplitude. Due to the high efficiency of aluminium nitride actuators and high Q value, a direct low-voltage CMOS interface can be implemented between the digital control system and piezoelectric actuators. The high amplitude feedback signals allow straightforward conversion to the digital domain and enable monitoring of operation mode and phase.
Original languageEnglish
Title of host publicationLaser Beam Shaping XXII
EditorsAngela Dudley, Alexander V. Laskin
PublisherInternational Society for Optics and Photonics SPIE
ISBN (Electronic)9781510654211
ISBN (Print)9781510654204
Publication statusPublished - 3 Oct 2022
MoE publication typeA4 Article in a conference publication
EventLaser Beam Shaping XXII 2022 - San Diego, United States
Duration: 23 Aug 2022 → …

Publication series

SeriesProceedings of SPIE


ConferenceLaser Beam Shaping XXII 2022
Country/TerritoryUnited States
CitySan Diego
Period23/08/22 → …


  • Actuators
  • Aluminum nitride
  • electronics
  • logic
  • Microelectromechanical systems
  • Micromirrors
  • mirrors
  • Mirrors
  • Optical microsystems
  • piezoelectric effect
  • Resonators
  • scanning
  • Semiconducting wafers


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