RF MEMS impedance tuners for 6-24 GHz applications

Tauno Vähä-Heikkilä (Corresponding Author), Koen Van Caekenberghe, Jussi Varis, Jussi Tuovinen, Gabriel M. Rebeiz

    Research output: Contribution to journalArticleScientificpeer-review

    25 Citations (Scopus)


    RF MEMS tuners with wide impedance coverage have been developed for 6–24 GHz noise parameter and load‐pull measurement systems. The tuners are based on triple‐, double‐, and single‐stub topologies loaded with switched MEMS capacitors.
    Several designs are presented, and they use 10–13 switched MEMS capacitors to produce 1024–8192 (210–213) different impedances. The measured impedance coverage agrees well with simulations and it is the widest ever measured impedance coverage from any planar tuner to‐date.
    Original languageEnglish
    Pages (from-to)265-278
    JournalInternational Journal of RF and Microwave Computer-Aided Engineering
    Issue number3
    Publication statusPublished - 2007
    MoE publication typeA1 Journal article-refereed


    • RF-MEMS
    • MEMS
    • impedance tuner
    • noise parameters
    • load-pull
    • matching network
    • antenna tuner


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