RF MEMS impedance tuners for 6-24 GHz applications

Tauno Vähä-Heikkilä; Koen Van Caekenberghe; Jussi Varis; Jussi Tuovinen; Gabriel M. Rebeiz

doi:10.1002/mmce.20220

RF MEMS impedance tuners for 6-24 GHz applications

Tauno Vähä-Heikkilä (Corresponding Author), Koen Van Caekenberghe, Jussi Varis, Jussi Tuovinen, Gabriel M. Rebeiz

University of Michigan

Research output: Contribution to journal › Article › Scientific › peer-review

23 Citations (Scopus)

Abstract

RF MEMS tuners with wide impedance coverage have been developed for 6–24 GHz noise parameter and load‐pull measurement systems. The tuners are based on triple‐, double‐, and single‐stub topologies loaded with switched MEMS capacitors.
Several designs are presented, and they use 10–13 switched MEMS capacitors to produce 1024–8192 (210–213) different impedances. The measured impedance coverage agrees well with simulations and it is the widest ever measured impedance coverage from any planar tuner to‐date.

Original language	English
Pages (from-to)	265-278
Journal	International Journal of RF and Microwave Computer-Aided Engineering
Volume	17
Issue number	3
DOIs	https://doi.org/10.1002/mmce.20220
Publication status	Published - 2007
MoE publication type	A1 Journal article-refereed

Keywords

RF-MEMS
MEMS
impedance tuner
noise parameters
load-pull
matching network
antenna tuner

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10.1002/mmce.20220

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title = "RF MEMS impedance tuners for 6-24 GHz applications",

abstract = "RF MEMS tuners with wide impedance coverage have been developed for 6–24 GHz noise parameter and load‐pull measurement systems. The tuners are based on triple‐, double‐, and single‐stub topologies loaded with switched MEMS capacitors. Several designs are presented, and they use 10–13 switched MEMS capacitors to produce 1024–8192 (210–213) different impedances. The measured impedance coverage agrees well with simulations and it is the widest ever measured impedance coverage from any planar tuner to‐date.",

keywords = "RF-MEMS, MEMS, impedance tuner, noise parameters, load-pull, matching network, antenna tuner",

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T1 - RF MEMS impedance tuners for 6-24 GHz applications

AU - Vähä-Heikkilä, Tauno

AU - Van Caekenberghe, Koen

AU - Varis, Jussi

AU - Tuovinen, Jussi

AU - Rebeiz, Gabriel M.

PY - 2007

Y1 - 2007

N2 - RF MEMS tuners with wide impedance coverage have been developed for 6–24 GHz noise parameter and load‐pull measurement systems. The tuners are based on triple‐, double‐, and single‐stub topologies loaded with switched MEMS capacitors. Several designs are presented, and they use 10–13 switched MEMS capacitors to produce 1024–8192 (210–213) different impedances. The measured impedance coverage agrees well with simulations and it is the widest ever measured impedance coverage from any planar tuner to‐date.

AB - RF MEMS tuners with wide impedance coverage have been developed for 6–24 GHz noise parameter and load‐pull measurement systems. The tuners are based on triple‐, double‐, and single‐stub topologies loaded with switched MEMS capacitors. Several designs are presented, and they use 10–13 switched MEMS capacitors to produce 1024–8192 (210–213) different impedances. The measured impedance coverage agrees well with simulations and it is the widest ever measured impedance coverage from any planar tuner to‐date.

KW - RF-MEMS

KW - MEMS

KW - impedance tuner

KW - noise parameters

KW - load-pull

KW - matching network

KW - antenna tuner

U2 - 10.1002/mmce.20220

DO - 10.1002/mmce.20220

M3 - Article

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EP - 278

JO - International Journal of RF and Microwave Computer-Aided Engineering

JF - International Journal of RF and Microwave Computer-Aided Engineering

SN - 1096-4290

IS - 3

ER -

RF MEMS impedance tuners for 6-24 GHz applications

Abstract

Keywords

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