RF MEMS impedance tuners for 6-24 GHz applications

Tauno Vähä-Heikkilä (Corresponding Author), Koen Van Caekenberghe, Jussi Varis, Jussi Tuovinen, Gabriel M. Rebeiz

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RF MEMS tuners with wide impedance coverage have been developed for 6–24 GHz noise parameter and load‐pull measurement systems. The tuners are based on triple‐, double‐, and single‐stub topologies loaded with switched MEMS capacitors.
Several designs are presented, and they use 10–13 switched MEMS capacitors to produce 1024–8192 (210–213) different impedances. The measured impedance coverage agrees well with simulations and it is the widest ever measured impedance coverage from any planar tuner to‐date.
Original languageEnglish
Pages (from-to)265-278
JournalInternational Journal of RF and Microwave Computer-Aided Engineering
Issue number3
Publication statusPublished - 2007
MoE publication typeA1 Journal article-refereed



  • MEMS
  • impedance tuner
  • noise parameters
  • load-pull
  • matching network
  • antenna tuner

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