RF MEMS impedance tuners for 6-24 GHz applications

Tauno Vähä-Heikkilä (Corresponding Author), Koen Van Caekenberghe, Jussi Varis, Jussi Tuovinen, Gabriel M. Rebeiz

Research output: Contribution to journalArticleScientificpeer-review

19 Citations (Scopus)

Abstract

RF MEMS tuners with wide impedance coverage have been developed for 6–24 GHz noise parameter and load‐pull measurement systems. The tuners are based on triple‐, double‐, and single‐stub topologies loaded with switched MEMS capacitors.
Several designs are presented, and they use 10–13 switched MEMS capacitors to produce 1024–8192 (210–213) different impedances. The measured impedance coverage agrees well with simulations and it is the widest ever measured impedance coverage from any planar tuner to‐date.
Original languageEnglish
Pages (from-to)265-278
JournalInternational Journal of RF and Microwave Computer-Aided Engineering
Volume17
Issue number3
DOIs
Publication statusPublished - 2007
MoE publication typeA1 Journal article-refereed

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Tuners
MEMS
Capacitors
Topology

Keywords

  • RF-MEMS
  • MEMS
  • impedance tuner
  • noise parameters
  • load-pull
  • matching network
  • antenna tuner

Cite this

Vähä-Heikkilä, Tauno ; Van Caekenberghe, Koen ; Varis, Jussi ; Tuovinen, Jussi ; Rebeiz, Gabriel M. / RF MEMS impedance tuners for 6-24 GHz applications. In: International Journal of RF and Microwave Computer-Aided Engineering. 2007 ; Vol. 17, No. 3. pp. 265-278.
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RF MEMS impedance tuners for 6-24 GHz applications. / Vähä-Heikkilä, Tauno (Corresponding Author); Van Caekenberghe, Koen; Varis, Jussi; Tuovinen, Jussi; Rebeiz, Gabriel M.

In: International Journal of RF and Microwave Computer-Aided Engineering, Vol. 17, No. 3, 2007, p. 265-278.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - RF MEMS impedance tuners for 6-24 GHz applications

AU - Vähä-Heikkilä, Tauno

AU - Van Caekenberghe, Koen

AU - Varis, Jussi

AU - Tuovinen, Jussi

AU - Rebeiz, Gabriel M.

PY - 2007

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N2 - RF MEMS tuners with wide impedance coverage have been developed for 6–24 GHz noise parameter and load‐pull measurement systems. The tuners are based on triple‐, double‐, and single‐stub topologies loaded with switched MEMS capacitors. Several designs are presented, and they use 10–13 switched MEMS capacitors to produce 1024–8192 (210–213) different impedances. The measured impedance coverage agrees well with simulations and it is the widest ever measured impedance coverage from any planar tuner to‐date.

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KW - RF-MEMS

KW - MEMS

KW - impedance tuner

KW - noise parameters

KW - load-pull

KW - matching network

KW - antenna tuner

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