Abstract
Several designs are presented, and they use 10–13 switched MEMS capacitors to produce 1024–8192 (210–213) different impedances. The measured impedance coverage agrees well with simulations and it is the widest ever measured impedance coverage from any planar tuner to‐date.
| Original language | English |
|---|---|
| Pages (from-to) | 265-278 |
| Journal | International Journal of RF and Microwave Computer-Aided Engineering |
| Volume | 17 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 2007 |
| MoE publication type | A1 Journal article-refereed |
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Keywords
- RF-MEMS
- MEMS
- impedance tuner
- noise parameters
- load-pull
- matching network
- antenna tuner
Cite this
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RF MEMS impedance tuners for 6-24 GHz applications. / Vähä-Heikkilä, Tauno (Corresponding Author); Van Caekenberghe, Koen; Varis, Jussi; Tuovinen, Jussi; Rebeiz, Gabriel M.
In: International Journal of RF and Microwave Computer-Aided Engineering, Vol. 17, No. 3, 2007, p. 265-278.Research output: Contribution to journal › Article › Scientific › peer-review
TY - JOUR
T1 - RF MEMS impedance tuners for 6-24 GHz applications
AU - Vähä-Heikkilä, Tauno
AU - Van Caekenberghe, Koen
AU - Varis, Jussi
AU - Tuovinen, Jussi
AU - Rebeiz, Gabriel M.
PY - 2007
Y1 - 2007
N2 - RF MEMS tuners with wide impedance coverage have been developed for 6–24 GHz noise parameter and load‐pull measurement systems. The tuners are based on triple‐, double‐, and single‐stub topologies loaded with switched MEMS capacitors. Several designs are presented, and they use 10–13 switched MEMS capacitors to produce 1024–8192 (210–213) different impedances. The measured impedance coverage agrees well with simulations and it is the widest ever measured impedance coverage from any planar tuner to‐date.
AB - RF MEMS tuners with wide impedance coverage have been developed for 6–24 GHz noise parameter and load‐pull measurement systems. The tuners are based on triple‐, double‐, and single‐stub topologies loaded with switched MEMS capacitors. Several designs are presented, and they use 10–13 switched MEMS capacitors to produce 1024–8192 (210–213) different impedances. The measured impedance coverage agrees well with simulations and it is the widest ever measured impedance coverage from any planar tuner to‐date.
KW - RF-MEMS
KW - MEMS
KW - impedance tuner
KW - noise parameters
KW - load-pull
KW - matching network
KW - antenna tuner
U2 - 10.1002/mmce.20220
DO - 10.1002/mmce.20220
M3 - Article
VL - 17
SP - 265
EP - 278
JO - International Journal of RF and Microwave Computer-Aided Engineering
JF - International Journal of RF and Microwave Computer-Aided Engineering
SN - 1096-4290
IS - 3
ER -