RF MEMS-MMIC building blocks for emerging wireless systems and RF-sensing applications

R. Malmqvist, C. Samuelsson, Pekka Rantakari, P. Frijlink, D. Smith, W. Simon, Jan Saijets, Tauno Vähä-Heikkilä, R. Baggen

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    3 Citations (Scopus)

    Abstract

    In this paper we present the main scope and initial results obtained within a pan-European research activity aiming at a successful monolithic integration of innovative RF MEMS switches into a standard GaAs MMIC process technology. Measured results of a fabricated ohmic contact type of RF MEMS switch developed by the OMMIC foundry show promising results e.g. in terms of low RF losses (0.2-0.4 dB is obtained from DC up to 30 GHz). The experimentally verified GaAs based RF MEMS switch has further been used to design low-loss MMIC building blocks such as switching, matching and phase shifting circuits for various RF applications up to 40 GHz. (12 refs.)
    Original languageEnglish
    Title of host publicationProceedings
    Subtitle of host publicationEuropean Microwave Integrated Circuits Conference, EuMIC 2009
    Place of PublicationPiscataway, NJ, USA
    PublisherIEEE Institute of Electrical and Electronic Engineers
    Pages363-366
    ISBN (Print)978-1-4244-4749-7
    Publication statusPublished - 2009
    MoE publication typeA4 Article in a conference publication
    EventEuropean Microwave Integrated Circuits Conference, EuMIC 2009 - Rome, Italy
    Duration: 28 Sep 200929 Sep 2009

    Conference

    ConferenceEuropean Microwave Integrated Circuits Conference, EuMIC 2009
    Abbreviated titleEuMIC 2009
    Country/TerritoryItaly
    CityRome
    Period28/09/0929/09/09

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