RF MEMS-MMIC building blocks for emerging wireless systems and RF-sensing applications

R. Malmqvist; C. Samuelsson; Pekka Rantakari; P. Frijlink; D. Smith; W. Simon; Jan Saijets; Tauno Vähä-Heikkilä; R. Baggen

RF MEMS-MMIC building blocks for emerging wireless systems and RF-sensing applications

R. Malmqvist, C. Samuelsson, Pekka Rantakari, P. Frijlink, D. Smith, W. Simon, Jan Saijets, Tauno Vähä-Heikkilä, R. Baggen

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

3 Citations (Scopus)

Abstract

In this paper we present the main scope and initial results obtained within a pan-European research activity aiming at a successful monolithic integration of innovative RF MEMS switches into a standard GaAs MMIC process technology. Measured results of a fabricated ohmic contact type of RF MEMS switch developed by the OMMIC foundry show promising results e.g. in terms of low RF losses (0.2-0.4 dB is obtained from DC up to 30 GHz). The experimentally verified GaAs based RF MEMS switch has further been used to design low-loss MMIC building blocks such as switching, matching and phase shifting circuits for various RF applications up to 40 GHz. (12 refs.)

Original language	English
Title of host publication	Proceedings
Subtitle of host publication	European Microwave Integrated Circuits Conference, EuMIC 2009
Place of Publication	Piscataway, NJ, USA
Publisher	IEEE Institute of Electrical and Electronic Engineers
Pages	363-366
ISBN (Print)	978-1-4244-4749-7
Publication status	Published - 2009
MoE publication type	A4 Article in a conference publication
Event	European Microwave Integrated Circuits Conference, EuMIC 2009 - Rome, Italy Duration: 28 Sept 2009 → 29 Sept 2009

Conference

Conference	European Microwave Integrated Circuits Conference, EuMIC 2009
Abbreviated title	EuMIC 2009
Country/Territory	Italy
City	Rome
Period	28/09/09 → 29/09/09

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Malmqvist, R., Samuelsson, C., Rantakari, P., Frijlink, P., Smith, D., Simon, W., Saijets, J., Vähä-Heikkilä, T., & Baggen, R. (2009). RF MEMS-MMIC building blocks for emerging wireless systems and RF-sensing applications. In Proceedings: European Microwave Integrated Circuits Conference, EuMIC 2009 (pp. 363-366). IEEE Institute of Electrical and Electronic Engineers. https://ieeexplore.ieee.org/document/5296032

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title = "RF MEMS-MMIC building blocks for emerging wireless systems and RF-sensing applications",

abstract = "In this paper we present the main scope and initial results obtained within a pan-European research activity aiming at a successful monolithic integration of innovative RF MEMS switches into a standard GaAs MMIC process technology. Measured results of a fabricated ohmic contact type of RF MEMS switch developed by the OMMIC foundry show promising results e.g. in terms of low RF losses (0.2-0.4 dB is obtained from DC up to 30 GHz). The experimentally verified GaAs based RF MEMS switch has further been used to design low-loss MMIC building blocks such as switching, matching and phase shifting circuits for various RF applications up to 40 GHz. (12 refs.)",

author = "R. Malmqvist and C. Samuelsson and Pekka Rantakari and P. Frijlink and D. Smith and W. Simon and Jan Saijets and Tauno V{\"a}h{\"a}-Heikkil{\"a} and R. Baggen",

year = "2009",

language = "English",

isbn = "978-1-4244-4749-7",

pages = "363--366",

booktitle = "Proceedings",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

address = "United States",

note = "European Microwave Integrated Circuits Conference, EuMIC 2009, EuMIC 2009 ; Conference date: 28-09-2009 Through 29-09-2009",

}

Malmqvist, R, Samuelsson, C, Rantakari, P, Frijlink, P, Smith, D, Simon, W, Saijets, J , Vähä-Heikkilä, T & Baggen, R 2009, RF MEMS-MMIC building blocks for emerging wireless systems and RF-sensing applications. in Proceedings: European Microwave Integrated Circuits Conference, EuMIC 2009. IEEE Institute of Electrical and Electronic Engineers, Piscataway, NJ, USA, pp. 363-366, European Microwave Integrated Circuits Conference, EuMIC 2009, Rome, Italy, 28/09/09. <https://ieeexplore.ieee.org/document/5296032>

RF MEMS-MMIC building blocks for emerging wireless systems and RF-sensing applications. / Malmqvist, R.; Samuelsson, C.; Rantakari, Pekka et al.

Proceedings: European Microwave Integrated Circuits Conference, EuMIC 2009. Piscataway, NJ, USA : IEEE Institute of Electrical and Electronic Engineers, 2009. p. 363-366.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - RF MEMS-MMIC building blocks for emerging wireless systems and RF-sensing applications

AU - Malmqvist, R.

AU - Samuelsson, C.

AU - Rantakari, Pekka

AU - Frijlink, P.

AU - Smith, D.

AU - Simon, W.

AU - Saijets, Jan

AU - Vähä-Heikkilä, Tauno

AU - Baggen, R.

PY - 2009

Y1 - 2009

N2 - In this paper we present the main scope and initial results obtained within a pan-European research activity aiming at a successful monolithic integration of innovative RF MEMS switches into a standard GaAs MMIC process technology. Measured results of a fabricated ohmic contact type of RF MEMS switch developed by the OMMIC foundry show promising results e.g. in terms of low RF losses (0.2-0.4 dB is obtained from DC up to 30 GHz). The experimentally verified GaAs based RF MEMS switch has further been used to design low-loss MMIC building blocks such as switching, matching and phase shifting circuits for various RF applications up to 40 GHz. (12 refs.)

AB - In this paper we present the main scope and initial results obtained within a pan-European research activity aiming at a successful monolithic integration of innovative RF MEMS switches into a standard GaAs MMIC process technology. Measured results of a fabricated ohmic contact type of RF MEMS switch developed by the OMMIC foundry show promising results e.g. in terms of low RF losses (0.2-0.4 dB is obtained from DC up to 30 GHz). The experimentally verified GaAs based RF MEMS switch has further been used to design low-loss MMIC building blocks such as switching, matching and phase shifting circuits for various RF applications up to 40 GHz. (12 refs.)

M3 - Conference article in proceedings

SN - 978-1-4244-4749-7

SP - 363

EP - 366

BT - Proceedings

PB - IEEE Institute of Electrical and Electronic Engineers

CY - Piscataway, NJ, USA

T2 - European Microwave Integrated Circuits Conference, EuMIC 2009

Y2 - 28 September 2009 through 29 September 2009

ER -

RF MEMS-MMIC building blocks for emerging wireless systems and RF-sensing applications

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