RF MEMS-MMIC building blocks for emerging wireless systems and RF-sensing applications

R. Malmqvist, C. Samuelsson, Pekka Rantakari, P. Frijlink, D. Smith, W. Simon, Jan Saijets, Tauno Vähä-Heikkilä, R. Baggen

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

3 Citations (Scopus)

Abstract

In this paper we present the main scope and initial results obtained within a pan-European research activity aiming at a successful monolithic integration of innovative RF MEMS switches into a standard GaAs MMIC process technology. Measured results of a fabricated ohmic contact type of RF MEMS switch developed by the OMMIC foundry show promising results e.g. in terms of low RF losses (0.2-0.4 dB is obtained from DC up to 30 GHz). The experimentally verified GaAs based RF MEMS switch has further been used to design low-loss MMIC building blocks such as switching, matching and phase shifting circuits for various RF applications up to 40 GHz. (12 refs.)
Original languageEnglish
Title of host publicationProceedings
Subtitle of host publicationEuropean Microwave Integrated Circuits Conference, EuMIC 2009
Place of PublicationPiscataway, NJ, USA
PublisherIEEE Institute of Electrical and Electronic Engineers
Pages363-366
ISBN (Print)978-1-4244-4749-7
Publication statusPublished - 2009
MoE publication typeA4 Article in a conference publication
EventEuropean Microwave Integrated Circuits Conference, EuMIC 2009 - Rome, Italy
Duration: 28 Sep 200929 Sep 2009

Conference

ConferenceEuropean Microwave Integrated Circuits Conference, EuMIC 2009
Abbreviated titleEuMIC 2009
CountryItaly
CityRome
Period28/09/0929/09/09

Fingerprint

Monolithic microwave integrated circuits
MEMS
Switches
Ohmic contacts
Foundries
Networks (circuits)

Cite this

Malmqvist, R., Samuelsson, C., Rantakari, P., Frijlink, P., Smith, D., Simon, W., ... Baggen, R. (2009). RF MEMS-MMIC building blocks for emerging wireless systems and RF-sensing applications. In Proceedings: European Microwave Integrated Circuits Conference, EuMIC 2009 (pp. 363-366). Piscataway, NJ, USA: IEEE Institute of Electrical and Electronic Engineers .
Malmqvist, R. ; Samuelsson, C. ; Rantakari, Pekka ; Frijlink, P. ; Smith, D. ; Simon, W. ; Saijets, Jan ; Vähä-Heikkilä, Tauno ; Baggen, R. / RF MEMS-MMIC building blocks for emerging wireless systems and RF-sensing applications. Proceedings: European Microwave Integrated Circuits Conference, EuMIC 2009. Piscataway, NJ, USA : IEEE Institute of Electrical and Electronic Engineers , 2009. pp. 363-366
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author = "R. Malmqvist and C. Samuelsson and Pekka Rantakari and P. Frijlink and D. Smith and W. Simon and Jan Saijets and Tauno V{\"a}h{\"a}-Heikkil{\"a} and R. Baggen",
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Malmqvist, R, Samuelsson, C, Rantakari, P, Frijlink, P, Smith, D, Simon, W, Saijets, J, Vähä-Heikkilä, T & Baggen, R 2009, RF MEMS-MMIC building blocks for emerging wireless systems and RF-sensing applications. in Proceedings: European Microwave Integrated Circuits Conference, EuMIC 2009. IEEE Institute of Electrical and Electronic Engineers , Piscataway, NJ, USA, pp. 363-366, European Microwave Integrated Circuits Conference, EuMIC 2009, Rome, Italy, 28/09/09.

RF MEMS-MMIC building blocks for emerging wireless systems and RF-sensing applications. / Malmqvist, R.; Samuelsson, C.; Rantakari, Pekka; Frijlink, P.; Smith, D.; Simon, W.; Saijets, Jan; Vähä-Heikkilä, Tauno; Baggen, R.

Proceedings: European Microwave Integrated Circuits Conference, EuMIC 2009. Piscataway, NJ, USA : IEEE Institute of Electrical and Electronic Engineers , 2009. p. 363-366.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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AU - Malmqvist, R.

AU - Samuelsson, C.

AU - Rantakari, Pekka

AU - Frijlink, P.

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AU - Simon, W.

AU - Saijets, Jan

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AB - In this paper we present the main scope and initial results obtained within a pan-European research activity aiming at a successful monolithic integration of innovative RF MEMS switches into a standard GaAs MMIC process technology. Measured results of a fabricated ohmic contact type of RF MEMS switch developed by the OMMIC foundry show promising results e.g. in terms of low RF losses (0.2-0.4 dB is obtained from DC up to 30 GHz). The experimentally verified GaAs based RF MEMS switch has further been used to design low-loss MMIC building blocks such as switching, matching and phase shifting circuits for various RF applications up to 40 GHz. (12 refs.)

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Malmqvist R, Samuelsson C, Rantakari P, Frijlink P, Smith D, Simon W et al. RF MEMS-MMIC building blocks for emerging wireless systems and RF-sensing applications. In Proceedings: European Microwave Integrated Circuits Conference, EuMIC 2009. Piscataway, NJ, USA: IEEE Institute of Electrical and Electronic Engineers . 2009. p. 363-366