RF-MEMS reconfigurable GaAs MMICs and antennas for microwave/MM-wave applications

R. Malmqvist, R. Jonsson, C. Samuelsson, A. Gustafsson, S. Reyaz, D. Dancila, A. Rydberg, B. Grandchamp, S. Seok, M. Fryziel, P.-A. Rolland, P. Rantakari, Markku Lahti, Tauno Vähä-Heikkilä, R. Baggen

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    1 Citation (Scopus)


    This paper presents the results of some reconfigurable RF-MEMS switching circuits and antennas fabricated using GaAs MMIC and LTCC based processes. Wafer-level packaged GaAs RF-MEMS series and shunt switches demonstrating low losses (≤ 0.5 dB) up to 40 GHz are presented together with a compact Ka-band GaAs MEMS 3-bit phase shifter circuit and LTCC based array antenna modules. Furthermore, some GaAs MMIC wideband/V-band RF-MEMS switching networks and a W-band on-chip slot antenna design show promising RF properties for broadband mm-wave applications related to wireless communication and RF-sensing
    Original languageEnglish
    Title of host publicationCAS 2013 Proceedings
    Subtitle of host publication36th International Semiconductor Conference
    PublisherIEEE Institute of Electrical and Electronic Engineers
    ISBN (Electronic)978-1-4673-5672-5
    ISBN (Print)978-1-4673-5670-1
    Publication statusPublished - 2013
    MoE publication typeA4 Article in a conference publication
    Event36th International Semiconductor Conference, CAS 2013 - Sinaia, Romania
    Duration: 14 Oct 201316 Oct 2013


    Conference36th International Semiconductor Conference, CAS 2013
    Abbreviated titleCAS 2013


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