RFID MEMS Sensor Concept Based on Intermodulation Distortion

Ville Viikari, Heikki Seppä

    Research output: Contribution to journalArticleScientificpeer-review

    32 Citations (Scopus)


    This paper presents a passive wireless microelectromechanical systems (MEMS) sensor consisting of an antenna directly matched to a MEMS resonator. When the sensor is actuated at two signals at different frequencies it replies at an intermodulation frequency. An analytical equation for the mixing efficiency of a MEMS sensor is derived and verified by harmonic balance simulations. The concept is demonstrated experimentally and shown to be feasible for implementing sensors or tags readable across large distances.
    Original languageEnglish
    Pages (from-to)1918-1923
    JournalIEEE Sensors Journal
    Issue number12
    Publication statusPublished - 2009
    MoE publication typeA1 Journal article-refereed


    • mixers
    • radio frequency (RF) microelectromechanical systems (MEMS)
    • radio frequency identification (RFID)
    • wireless sensors


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