Abstract
This paper presents a passive wireless microelectromechanical systems (MEMS) sensor consisting of an antenna directly matched to a MEMS resonator. When the sensor is actuated at two signals at different frequencies it replies at an intermodulation frequency. An analytical equation for the mixing efficiency of a MEMS sensor is derived and verified by harmonic balance simulations. The concept is demonstrated experimentally and shown to be feasible for implementing sensors or tags readable across large distances.
| Original language | English |
|---|---|
| Pages (from-to) | 1918-1923 |
| Number of pages | 6 |
| Journal | IEEE Sensors Journal |
| Volume | 9 |
| Issue number | 12 |
| DOIs | |
| Publication status | Published - 2009 |
| MoE publication type | A1 Journal article-refereed |
Keywords
- mixers
- radio frequency (RF) microelectromechanical systems (MEMS)
- radio frequency identification (RFID)
- wireless sensors
Fingerprint Dive into the research topics of 'RFID MEMS Sensor Concept Based on Intermodulation Distortion'. Together they form a unique fingerprint.
Cite this
Viikari, V., & Seppä, H. (2009). RFID MEMS Sensor Concept Based on Intermodulation Distortion. IEEE Sensors Journal, 9(12), 1918-1923. https://doi.org/10.1109/JSEN.2009.2031809