RFID MEMS Sensor Concept Based on Intermodulation Distortion

Ville Viikari; Heikki Seppä

doi:10.1109/JSEN.2009.2031809

RFID MEMS Sensor Concept Based on Intermodulation Distortion

Ville Viikari, Heikki Seppä

Research output: Contribution to journal › Article › Scientific › peer-review

26 Citations (Scopus)

Abstract

This paper presents a passive wireless microelectromechanical systems (MEMS) sensor consisting of an antenna directly matched to a MEMS resonator. When the sensor is actuated at two signals at different frequencies it replies at an intermodulation frequency. An analytical equation for the mixing efficiency of a MEMS sensor is derived and verified by harmonic balance simulations. The concept is demonstrated experimentally and shown to be feasible for implementing sensors or tags readable across large distances.

Original language	English
Pages (from-to)	1918-1923
Number of pages	6
Journal	IEEE Sensors Journal
Volume	9
Issue number	12
DOIs	https://doi.org/10.1109/JSEN.2009.2031809
Publication status	Published - 2009
MoE publication type	A1 Journal article-refereed

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Keywords

mixers
radio frequency (RF) microelectromechanical systems (MEMS)
radio frequency identification (RFID)
wireless sensors

Cite this

Viikari, V., & Seppä, H. (2009). RFID MEMS Sensor Concept Based on Intermodulation Distortion. IEEE Sensors Journal, 9(12), 1918-1923. https://doi.org/10.1109/JSEN.2009.2031809

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abstract = "This paper presents a passive wireless microelectromechanical systems (MEMS) sensor consisting of an antenna directly matched to a MEMS resonator. When the sensor is actuated at two signals at different frequencies it replies at an intermodulation frequency. An analytical equation for the mixing efficiency of a MEMS sensor is derived and verified by harmonic balance simulations. The concept is demonstrated experimentally and shown to be feasible for implementing sensors or tags readable across large distances.",

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Access to Document

10.1109/JSEN.2009.2031809

http://www.vtt.fi/inf/julkaisut/muut/2009/RFID_MEMS.pdf