RFID MEMS Sensor Concept Based on Intermodulation Distortion

Ville Viikari, Heikki Seppä

    Research output: Contribution to journal › Article › Scientific › peer-review

    25 Citations (Scopus)

    Abstract

    This paper presents a passive wireless microelectromechanical systems (MEMS) sensor consisting of an antenna directly matched to a MEMS resonator. When the sensor is actuated at two signals at different frequencies it replies at an intermodulation frequency. An analytical equation for the mixing efficiency of a MEMS sensor is derived and verified by harmonic balance simulations. The concept is demonstrated experimentally and shown to be feasible for implementing sensors or tags readable across large distances.
    Original languageEnglish
    Pages (from-to)1918-1923
    Number of pages6
    JournalIEEE Sensors Journal
    Volume9
    Issue number12
    DOIs
    Publication statusPublished - 2009
    MoE publication typeA1 Journal article-refereed

    Fingerprint

    Intermodulation distortion
    intermodulation
    Radio frequency identification (RFID)
    microelectromechanical systems
    MEMS
    sensors
    Sensors
    Intermodulation
    Resonators
    antennas
    resonators
    Antennas
    harmonics
    simulation

    Keywords

    • mixers
    • radio frequency (RF) microelectromechanical systems (MEMS)
    • radio frequency identification (RFID)
    • wireless sensors

    Cite this

    Viikari, Ville ; Seppä, Heikki. / RFID MEMS Sensor Concept Based on Intermodulation Distortion. In: IEEE Sensors Journal. 2009 ; Vol. 9, No. 12. pp. 1918-1923.
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    abstract = "This paper presents a passive wireless microelectromechanical systems (MEMS) sensor consisting of an antenna directly matched to a MEMS resonator. When the sensor is actuated at two signals at different frequencies it replies at an intermodulation frequency. An analytical equation for the mixing efficiency of a MEMS sensor is derived and verified by harmonic balance simulations. The concept is demonstrated experimentally and shown to be feasible for implementing sensors or tags readable across large distances.",
    keywords = "mixers, radio frequency (RF) microelectromechanical systems (MEMS), radio frequency identification (RFID), wireless sensors",
    author = "Ville Viikari and Heikki Sepp{\"a}",
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    language = "English",
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    Viikari, V & Seppä, H 2009, 'RFID MEMS Sensor Concept Based on Intermodulation Distortion', IEEE Sensors Journal, vol. 9, no. 12, pp. 1918-1923. https://doi.org/10.1109/JSEN.2009.2031809

    RFID MEMS Sensor Concept Based on Intermodulation Distortion. / Viikari, Ville; Seppä, Heikki.

    In: IEEE Sensors Journal, Vol. 9, No. 12, 2009, p. 1918-1923.

    Research output: Contribution to journal › Article › Scientific › peer-review

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    T1 - RFID MEMS Sensor Concept Based on Intermodulation Distortion

    AU - Viikari, Ville

    AU - Seppä, Heikki

    N1 - Project code: 21012

    PY - 2009

    Y1 - 2009

    N2 - This paper presents a passive wireless microelectromechanical systems (MEMS) sensor consisting of an antenna directly matched to a MEMS resonator. When the sensor is actuated at two signals at different frequencies it replies at an intermodulation frequency. An analytical equation for the mixing efficiency of a MEMS sensor is derived and verified by harmonic balance simulations. The concept is demonstrated experimentally and shown to be feasible for implementing sensors or tags readable across large distances.

    AB - This paper presents a passive wireless microelectromechanical systems (MEMS) sensor consisting of an antenna directly matched to a MEMS resonator. When the sensor is actuated at two signals at different frequencies it replies at an intermodulation frequency. An analytical equation for the mixing efficiency of a MEMS sensor is derived and verified by harmonic balance simulations. The concept is demonstrated experimentally and shown to be feasible for implementing sensors or tags readable across large distances.

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    KW - radio frequency (RF) microelectromechanical systems (MEMS)

    KW - radio frequency identification (RFID)

    KW - wireless sensors

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    DO - 10.1109/JSEN.2009.2031809

    M3 - Article

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    JF - IEEE Sensors Journal

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    Viikari V, Seppä H. RFID MEMS Sensor Concept Based on Intermodulation Distortion. IEEE Sensors Journal. 2009;9(12):1918-1923. https://doi.org/10.1109/JSEN.2009.2031809

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