RFID MEMS Sensor Concept Based on Intermodulation Distortion

Ville Viikari, Heikki Seppä

Research output: Contribution to journal › Article › Scientific › peer-review

25 Citations (Scopus)

Abstract

This paper presents a passive wireless microelectromechanical systems (MEMS) sensor consisting of an antenna directly matched to a MEMS resonator. When the sensor is actuated at two signals at different frequencies it replies at an intermodulation frequency. An analytical equation for the mixing efficiency of a MEMS sensor is derived and verified by harmonic balance simulations. The concept is demonstrated experimentally and shown to be feasible for implementing sensors or tags readable across large distances.
Original languageEnglish
Pages (from-to)1918-1923
Number of pages6
JournalIEEE Sensors Journal
Volume9
Issue number12
DOIs
Publication statusPublished - 2009
MoE publication typeA1 Journal article-refereed

Fingerprint

Intermodulation distortion
intermodulation
Radio frequency identification (RFID)
microelectromechanical systems
MEMS
sensors
Sensors
Intermodulation
Resonators
antennas
resonators
Antennas
harmonics
simulation

Keywords

  • mixers
  • radio frequency (RF) microelectromechanical systems (MEMS)
  • radio frequency identification (RFID)
  • wireless sensors

Cite this

Viikari, Ville ; Seppä, Heikki. / RFID MEMS Sensor Concept Based on Intermodulation Distortion. In: IEEE Sensors Journal. 2009 ; Vol. 9, No. 12. pp. 1918-1923.
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abstract = "This paper presents a passive wireless microelectromechanical systems (MEMS) sensor consisting of an antenna directly matched to a MEMS resonator. When the sensor is actuated at two signals at different frequencies it replies at an intermodulation frequency. An analytical equation for the mixing efficiency of a MEMS sensor is derived and verified by harmonic balance simulations. The concept is demonstrated experimentally and shown to be feasible for implementing sensors or tags readable across large distances.",
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Viikari, V & Seppä, H 2009, 'RFID MEMS Sensor Concept Based on Intermodulation Distortion', IEEE Sensors Journal, vol. 9, no. 12, pp. 1918-1923. https://doi.org/10.1109/JSEN.2009.2031809

RFID MEMS Sensor Concept Based on Intermodulation Distortion. / Viikari, Ville; Seppä, Heikki.

In: IEEE Sensors Journal, Vol. 9, No. 12, 2009, p. 1918-1923.

Research output: Contribution to journal › Article › Scientific › peer-review

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T1 - RFID MEMS Sensor Concept Based on Intermodulation Distortion

AU - Viikari, Ville

AU - Seppä, Heikki

N1 - Project code: 21012

PY - 2009

Y1 - 2009

N2 - This paper presents a passive wireless microelectromechanical systems (MEMS) sensor consisting of an antenna directly matched to a MEMS resonator. When the sensor is actuated at two signals at different frequencies it replies at an intermodulation frequency. An analytical equation for the mixing efficiency of a MEMS sensor is derived and verified by harmonic balance simulations. The concept is demonstrated experimentally and shown to be feasible for implementing sensors or tags readable across large distances.

AB - This paper presents a passive wireless microelectromechanical systems (MEMS) sensor consisting of an antenna directly matched to a MEMS resonator. When the sensor is actuated at two signals at different frequencies it replies at an intermodulation frequency. An analytical equation for the mixing efficiency of a MEMS sensor is derived and verified by harmonic balance simulations. The concept is demonstrated experimentally and shown to be feasible for implementing sensors or tags readable across large distances.

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KW - radio frequency (RF) microelectromechanical systems (MEMS)

KW - radio frequency identification (RFID)

KW - wireless sensors

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DO - 10.1109/JSEN.2009.2031809

M3 - Article

VL - 9

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EP - 1923

JO - IEEE Sensors Journal

JF - IEEE Sensors Journal

SN - 1530-437X

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Viikari V, Seppä H. RFID MEMS Sensor Concept Based on Intermodulation Distortion. IEEE Sensors Journal. 2009;9(12):1918-1923. https://doi.org/10.1109/JSEN.2009.2031809

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