Robustness and reliability of MOEMS for miniature spectrometers

Anna Rissanen, M. Broas, J. Hokka, T. Mattila, Jarkko Antila, Mari Laamanen, Heikki Saari

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

3 Citations (Scopus)

Abstract

Tunable MOEMS Fabry-Perot interferometers (FPIs) are key elements in the miniaturization of spectroscopic instrumentation. Robustness and high reliability of the MOEMS structure are important factors especially for sensors utilized in challenging environments such as in space- and automotive applications. This paper presents reliability assessment of two types of MOEMS optical filters; a tunable ALD (atomic layer deposition) -based surface micromachined FPI for visible - near-infrared range, and a tunable FPI for mid- infrared applications based on LPCVD (low-pressure chemical vapor deposition) thin-film micromachining. High-G shock tests were performed on both MOEMS FPIs. The FPI structures can survive mechanical impact up to 18 000 G without any detectable changes in the capacitance, while detected failure mechanisms in this range arise from packaging and not from the MOEMS structures. The effect of DDMS SAM (dichlorodimethylsilane self-assembled monolayer) coating to prevent in-use stiction was evaluated in both humidity- and impact tests. In humidity tests, 20% stiction rate in non-coated devices vs. 0% stiction rate in DDMS-coated LPCVD FPIs under pull-in was observed. These results indicate good shock-impact robustness for both types of surface-micromachined structures, while DDMS SAM can be utilized to improve in-use reliability of MOEMS.
Original languageEnglish
Title of host publicationReliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII
EditorsRajeshuni Ramesham, Herbert R. Shea
PublisherInternational Society for Optics and Photonics SPIE
ISBN (Print)978-081949383-5
DOIs
Publication statusPublished - 2013
MoE publication typeNot Eligible
EventSPIE MOEMS-MEMS - San Francisco, CA, United States
Duration: 2 Feb 20137 Feb 2013

Publication series

NameProceedings of SPIE
PublisherSPIE
Volume8614
ISSN (Print)0277-786X

Conference

ConferenceSPIE MOEMS-MEMS
CountryUnited States
CitySan Francisco, CA
Period2/02/137/02/13

Fingerprint

MOEMS
Fabry-Perot interferometers
Spectrometers
Stiction
Low pressure chemical vapor deposition
Self assembled monolayers
Atmospheric humidity
Infrared radiation
Optical filters
Atomic layer deposition
Micromachining
Packaging
Capacitance
Thin films
Coatings
Sensors

Keywords

  • Fabry-Perot interferometer
  • miniature spectrometers
  • MOEMS
  • nanosatellite

Cite this

Rissanen, A., Broas, M., Hokka, J., Mattila, T., Antila, J., Laamanen, M., & Saari, H. (2013). Robustness and reliability of MOEMS for miniature spectrometers. In R. Ramesham, & H. R. Shea (Eds.), Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII [861409] International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 8614 https://doi.org/10.1117/12.2000495
Rissanen, Anna ; Broas, M. ; Hokka, J. ; Mattila, T. ; Antila, Jarkko ; Laamanen, Mari ; Saari, Heikki. / Robustness and reliability of MOEMS for miniature spectrometers. Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII. editor / Rajeshuni Ramesham ; Herbert R. Shea. International Society for Optics and Photonics SPIE, 2013. (Proceedings of SPIE, Vol. 8614).
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abstract = "Tunable MOEMS Fabry-Perot interferometers (FPIs) are key elements in the miniaturization of spectroscopic instrumentation. Robustness and high reliability of the MOEMS structure are important factors especially for sensors utilized in challenging environments such as in space- and automotive applications. This paper presents reliability assessment of two types of MOEMS optical filters; a tunable ALD (atomic layer deposition) -based surface micromachined FPI for visible - near-infrared range, and a tunable FPI for mid- infrared applications based on LPCVD (low-pressure chemical vapor deposition) thin-film micromachining. High-G shock tests were performed on both MOEMS FPIs. The FPI structures can survive mechanical impact up to 18 000 G without any detectable changes in the capacitance, while detected failure mechanisms in this range arise from packaging and not from the MOEMS structures. The effect of DDMS SAM (dichlorodimethylsilane self-assembled monolayer) coating to prevent in-use stiction was evaluated in both humidity- and impact tests. In humidity tests, 20{\%} stiction rate in non-coated devices vs. 0{\%} stiction rate in DDMS-coated LPCVD FPIs under pull-in was observed. These results indicate good shock-impact robustness for both types of surface-micromachined structures, while DDMS SAM can be utilized to improve in-use reliability of MOEMS.",
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author = "Anna Rissanen and M. Broas and J. Hokka and T. Mattila and Jarkko Antila and Mari Laamanen and Heikki Saari",
year = "2013",
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Rissanen, A, Broas, M, Hokka, J, Mattila, T, Antila, J, Laamanen, M & Saari, H 2013, Robustness and reliability of MOEMS for miniature spectrometers. in R Ramesham & HR Shea (eds), Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII., 861409, International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 8614, SPIE MOEMS-MEMS, San Francisco, CA, United States, 2/02/13. https://doi.org/10.1117/12.2000495

Robustness and reliability of MOEMS for miniature spectrometers. / Rissanen, Anna; Broas, M.; Hokka, J.; Mattila, T.; Antila, Jarkko; Laamanen, Mari; Saari, Heikki.

Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII. ed. / Rajeshuni Ramesham; Herbert R. Shea. International Society for Optics and Photonics SPIE, 2013. 861409 (Proceedings of SPIE, Vol. 8614).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - Robustness and reliability of MOEMS for miniature spectrometers

AU - Rissanen, Anna

AU - Broas, M.

AU - Hokka, J.

AU - Mattila, T.

AU - Antila, Jarkko

AU - Laamanen, Mari

AU - Saari, Heikki

PY - 2013

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N2 - Tunable MOEMS Fabry-Perot interferometers (FPIs) are key elements in the miniaturization of spectroscopic instrumentation. Robustness and high reliability of the MOEMS structure are important factors especially for sensors utilized in challenging environments such as in space- and automotive applications. This paper presents reliability assessment of two types of MOEMS optical filters; a tunable ALD (atomic layer deposition) -based surface micromachined FPI for visible - near-infrared range, and a tunable FPI for mid- infrared applications based on LPCVD (low-pressure chemical vapor deposition) thin-film micromachining. High-G shock tests were performed on both MOEMS FPIs. The FPI structures can survive mechanical impact up to 18 000 G without any detectable changes in the capacitance, while detected failure mechanisms in this range arise from packaging and not from the MOEMS structures. The effect of DDMS SAM (dichlorodimethylsilane self-assembled monolayer) coating to prevent in-use stiction was evaluated in both humidity- and impact tests. In humidity tests, 20% stiction rate in non-coated devices vs. 0% stiction rate in DDMS-coated LPCVD FPIs under pull-in was observed. These results indicate good shock-impact robustness for both types of surface-micromachined structures, while DDMS SAM can be utilized to improve in-use reliability of MOEMS.

AB - Tunable MOEMS Fabry-Perot interferometers (FPIs) are key elements in the miniaturization of spectroscopic instrumentation. Robustness and high reliability of the MOEMS structure are important factors especially for sensors utilized in challenging environments such as in space- and automotive applications. This paper presents reliability assessment of two types of MOEMS optical filters; a tunable ALD (atomic layer deposition) -based surface micromachined FPI for visible - near-infrared range, and a tunable FPI for mid- infrared applications based on LPCVD (low-pressure chemical vapor deposition) thin-film micromachining. High-G shock tests were performed on both MOEMS FPIs. The FPI structures can survive mechanical impact up to 18 000 G without any detectable changes in the capacitance, while detected failure mechanisms in this range arise from packaging and not from the MOEMS structures. The effect of DDMS SAM (dichlorodimethylsilane self-assembled monolayer) coating to prevent in-use stiction was evaluated in both humidity- and impact tests. In humidity tests, 20% stiction rate in non-coated devices vs. 0% stiction rate in DDMS-coated LPCVD FPIs under pull-in was observed. These results indicate good shock-impact robustness for both types of surface-micromachined structures, while DDMS SAM can be utilized to improve in-use reliability of MOEMS.

KW - Fabry-Perot interferometer

KW - miniature spectrometers

KW - MOEMS

KW - nanosatellite

U2 - 10.1117/12.2000495

DO - 10.1117/12.2000495

M3 - Conference article in proceedings

SN - 978-081949383-5

T3 - Proceedings of SPIE

BT - Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII

A2 - Ramesham, Rajeshuni

A2 - Shea, Herbert R.

PB - International Society for Optics and Photonics SPIE

ER -

Rissanen A, Broas M, Hokka J, Mattila T, Antila J, Laamanen M et al. Robustness and reliability of MOEMS for miniature spectrometers. In Ramesham R, Shea HR, editors, Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII. International Society for Optics and Photonics SPIE. 2013. 861409. (Proceedings of SPIE, Vol. 8614). https://doi.org/10.1117/12.2000495