Role of process gases in making tapered through-silicon vias for 3D MEMS packaging

Preadeep Dixit, Sami Vähänen, Jaakko Salonen, Philippe Monnoyer

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Fingerprint Dive into the research topics of 'Role of process gases in making tapered through-silicon vias for 3D MEMS packaging'. Together they form a unique fingerprint.

Physics & Astronomy