@inproceedings{5a29f3905daf4b3cb16e8140904df7bd,
title = "Roll-to-roll manufacturing technologies for flexible MEMS applications",
author = "Terho Kololuoma and Markus Tuomikoski and Tomi Haring and Harri Kopola",
year = "2005",
doi = "10.1109/OMEMS.2005.1540090",
language = "English",
isbn = "0-7803-9278-7",
series = "Optical MEMS, IEEE/LEOS International Conference on",
publisher = "IEEE Institute of Electrical and Electronic Engineers",
pages = "87--88",
booktitle = "IEEE/LEOS International Conference on Optical MEMs and Their Applications",
note = "IEEE/LEOS International Conference on Optical MEMs and Their Applications ; Conference date: 01-08-2005 Through 04-08-2005",
}