Roll-to-roll manufacturing technologies for flexible MEMS applications

Terho Kololuoma, Markus Tuomikoski, Tomi Haring, Harri Kopola

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    3 Citations (Scopus)

    Abstract

    Roll-to-roll fabrication of electrical and optical structures and functional elements on web will be described. Based on the realized components, the potential of the printing techniques for volume-scale MEMS fabrication will be introduced.
    Original languageEnglish
    Title of host publicationIEEE/LEOS International Conference on Optical MEMs and Their Applications
    PublisherIEEE Institute of Electrical and Electronic Engineers
    Pages87-88
    ISBN (Print)978-0-7803-9278-6
    DOIs
    Publication statusPublished - 2005
    MoE publication typeA4 Article in a conference publication
    EventIEEE/LEOS International Conference on Optical MEMs and Their Applications - Oulu, Finland
    Duration: 1 Aug 20054 Aug 2005

    Publication series

    SeriesOptical MEMS, IEEE/LEOS International Conference on
    ISSN2160-5033

    Conference

    ConferenceIEEE/LEOS International Conference on Optical MEMs and Their Applications
    Country/TerritoryFinland
    CityOulu
    Period1/08/054/08/05

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