Roll-to-roll manufacturing technologies for flexible MEMS applications

Terho Kololuoma, Markus Tuomikoski, Tomi Haring, Harri Kopola

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

3 Citations (Scopus)
Original languageEnglish
Title of host publicationIEEE/LEOS International Conference on Optical MEMs and Their Applications
Pages87-88
DOIs
Publication statusPublished - 2005
MoE publication typeA4 Article in a conference publication
EventIEEE/LEOS International Conference on Optical MEMs and Their Applications - Oulu, Finland
Duration: 1 Aug 20054 Aug 2005

Publication series

SeriesOptical MEMS, IEEE/LEOS International Conference on
ISSN2160-5033

Conference

ConferenceIEEE/LEOS International Conference on Optical MEMs and Their Applications
CountryFinland
CityOulu
Period1/08/054/08/05

Cite this

Kololuoma, T., Tuomikoski, M., Haring, T., & Kopola, H. (2005). Roll-to-roll manufacturing technologies for flexible MEMS applications. In IEEE/LEOS International Conference on Optical MEMs and Their Applications (pp. 87-88). Optical MEMS, IEEE/LEOS International Conference on https://doi.org/10.1109/OMEMS.2005.1540090