| Original language | English |
|---|---|
| Title of host publication | IEEE/LEOS International Conference on Optical MEMs and Their Applications |
| Pages | 87-88 |
| DOIs | |
| Publication status | Published - 2005 |
| MoE publication type | A4 Article in a conference publication |
| Event | IEEE/LEOS International Conference on Optical MEMs and Their Applications - Oulu, Finland Duration: 1 Aug 2005 → 4 Aug 2005 |
Publication series
| Series | Optical MEMS, IEEE/LEOS International Conference on |
|---|---|
| ISSN | 2160-5033 |
Conference
| Conference | IEEE/LEOS International Conference on Optical MEMs and Their Applications |
|---|---|
| Country | Finland |
| City | Oulu |
| Period | 1/08/05 → 4/08/05 |
Cite this
Kololuoma, T., Tuomikoski, M., Haring, T., & Kopola, H. (2005). Roll-to-roll manufacturing technologies for flexible MEMS applications. In IEEE/LEOS International Conference on Optical MEMs and Their Applications (pp. 87-88). Optical MEMS, IEEE/LEOS International Conference on https://doi.org/10.1109/OMEMS.2005.1540090
@inproceedings{5a29f3905daf4b3cb16e8140904df7bd,
title = "Roll-to-roll manufacturing technologies for flexible MEMS applications",
author = "Terho Kololuoma and Markus Tuomikoski and Tomi Haring and Harri Kopola",
year = "2005",
doi = "10.1109/OMEMS.2005.1540090",
language = "English",
isbn = "0-7803-9278-7",
series = "Optical MEMS, IEEE/LEOS International Conference on",
publisher = "IEEE Institute of Electrical and Electronic Engineers",
pages = "87--88",
booktitle = "IEEE/LEOS International Conference on Optical MEMs and Their Applications",
}
Kololuoma, T, Tuomikoski, M, Haring, T & Kopola, H 2005, Roll-to-roll manufacturing technologies for flexible MEMS applications. in IEEE/LEOS International Conference on Optical MEMs and Their Applications. Optical MEMS, IEEE/LEOS International Conference on, pp. 87-88, IEEE/LEOS International Conference on Optical MEMs and Their Applications, Oulu, Finland, 1/08/05. https://doi.org/10.1109/OMEMS.2005.1540090
Roll-to-roll manufacturing technologies for flexible MEMS applications. / Kololuoma, Terho; Tuomikoski, Markus; Haring, Tomi; Kopola, Harri.
IEEE/LEOS International Conference on Optical MEMs and Their Applications. 2005. p. 87-88 (Optical MEMS, IEEE/LEOS International Conference on).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
TY - GEN
T1 - Roll-to-roll manufacturing technologies for flexible MEMS applications
AU - Kololuoma, Terho
AU - Tuomikoski, Markus
AU - Haring, Tomi
AU - Kopola, Harri
PY - 2005
Y1 - 2005
U2 - 10.1109/OMEMS.2005.1540090
DO - 10.1109/OMEMS.2005.1540090
M3 - Conference article in proceedings
SN - 0-7803-9278-7
T3 - Optical MEMS, IEEE/LEOS International Conference on
SP - 87
EP - 88
BT - IEEE/LEOS International Conference on Optical MEMs and Their Applications
ER -
Kololuoma T, Tuomikoski M, Haring T, Kopola H. Roll-to-roll manufacturing technologies for flexible MEMS applications. In IEEE/LEOS International Conference on Optical MEMs and Their Applications. 2005. p. 87-88. (Optical MEMS, IEEE/LEOS International Conference on). https://doi.org/10.1109/OMEMS.2005.1540090