Roll-to-roll manufacturing technologies for flexible MEMS applications

Terho Kololuoma; Markus Tuomikoski; Tomi Haring; Harri Kopola

doi:10.1109/OMEMS.2005.1540090

Roll-to-roll manufacturing technologies for flexible MEMS applications

Terho Kololuoma, Markus Tuomikoski, Tomi Haring, Harri Kopola

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

3 Citations (Scopus)

Original language	English
Title of host publication	IEEE/LEOS International Conference on Optical MEMs and Their Applications
Pages	87-88
DOIs	https://doi.org/10.1109/OMEMS.2005.1540090
Publication status	Published - 2005
MoE publication type	A4 Article in a conference publication
Event	IEEE/LEOS International Conference on Optical MEMs and Their Applications - Oulu, Finland Duration: 1 Aug 2005 → 4 Aug 2005

Publication series

Series	Optical MEMS, IEEE/LEOS International Conference on
ISSN	2160-5033

Conference

Conference	IEEE/LEOS International Conference on Optical MEMs and Their Applications
Country	Finland
City	Oulu
Period	1/08/05 → 4/08/05

Access to Document

10.1109/OMEMS.2005.1540090

Cite this

Kololuoma, T., Tuomikoski, M., Haring, T., & Kopola, H. (2005). Roll-to-roll manufacturing technologies for flexible MEMS applications. In IEEE/LEOS International Conference on Optical MEMs and Their Applications (pp. 87-88). Optical MEMS, IEEE/LEOS International Conference on https://doi.org/10.1109/OMEMS.2005.1540090

@inproceedings{5a29f3905daf4b3cb16e8140904df7bd,

title = "Roll-to-roll manufacturing technologies for flexible MEMS applications",

author = "Terho Kololuoma and Markus Tuomikoski and Tomi Haring and Harri Kopola",

year = "2005",

doi = "10.1109/OMEMS.2005.1540090",

language = "English",

isbn = "0-7803-9278-7",

series = "Optical MEMS, IEEE/LEOS International Conference on",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

pages = "87--88",

booktitle = "IEEE/LEOS International Conference on Optical MEMs and Their Applications",

note = "IEEE/LEOS International Conference on Optical MEMs and Their Applications ; Conference date: 01-08-2005 Through 04-08-2005",

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Kololuoma, T , Tuomikoski, M, Haring, T & Kopola, H 2005, Roll-to-roll manufacturing technologies for flexible MEMS applications. in IEEE/LEOS International Conference on Optical MEMs and Their Applications. Optical MEMS, IEEE/LEOS International Conference on, pp. 87-88, IEEE/LEOS International Conference on Optical MEMs and Their Applications, Oulu, Finland, 1/08/05. https://doi.org/10.1109/OMEMS.2005.1540090

Roll-to-roll manufacturing technologies for flexible MEMS applications. / Kololuoma, Terho ; Tuomikoski, Markus; Haring, Tomi; Kopola, Harri.

IEEE/LEOS International Conference on Optical MEMs and Their Applications. 2005. p. 87-88 (Optical MEMS, IEEE/LEOS International Conference on).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Roll-to-roll manufacturing technologies for flexible MEMS applications

AU - Kololuoma, Terho

AU - Tuomikoski, Markus

AU - Haring, Tomi

AU - Kopola, Harri

PY - 2005

Y1 - 2005

U2 - 10.1109/OMEMS.2005.1540090

DO - 10.1109/OMEMS.2005.1540090

M3 - Conference article in proceedings

SN - 0-7803-9278-7

T3 - Optical MEMS, IEEE/LEOS International Conference on

SP - 87

EP - 88

BT - IEEE/LEOS International Conference on Optical MEMs and Their Applications

T2 - IEEE/LEOS International Conference on Optical MEMs and Their Applications

Y2 - 1 August 2005 through 4 August 2005

ER -