Roll-to-roll manufacturing technologies for flexible MEMS applications

Terho Kololuoma, Markus Tuomikoski, Tomi Haring, Harri Kopola

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

3 Citations (Scopus)
Original languageEnglish
Title of host publicationIEEE/LEOS International Conference on Optical MEMs and Their Applications
Pages87-88
DOIs
Publication statusPublished - 2005
MoE publication typeA4 Article in a conference publication
EventIEEE/LEOS International Conference on Optical MEMs and Their Applications - Oulu, Finland
Duration: 1 Aug 20054 Aug 2005

Publication series

SeriesOptical MEMS, IEEE/LEOS International Conference on
ISSN2160-5033

Conference

ConferenceIEEE/LEOS International Conference on Optical MEMs and Their Applications
CountryFinland
CityOulu
Period1/08/054/08/05

Cite this

Kololuoma, T., Tuomikoski, M., Haring, T., & Kopola, H. (2005). Roll-to-roll manufacturing technologies for flexible MEMS applications. In IEEE/LEOS International Conference on Optical MEMs and Their Applications (pp. 87-88). Optical MEMS, IEEE/LEOS International Conference on https://doi.org/10.1109/OMEMS.2005.1540090
Kololuoma, Terho ; Tuomikoski, Markus ; Haring, Tomi ; Kopola, Harri. / Roll-to-roll manufacturing technologies for flexible MEMS applications. IEEE/LEOS International Conference on Optical MEMs and Their Applications. 2005. pp. 87-88 (Optical MEMS, IEEE/LEOS International Conference on).
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title = "Roll-to-roll manufacturing technologies for flexible MEMS applications",
author = "Terho Kololuoma and Markus Tuomikoski and Tomi Haring and Harri Kopola",
year = "2005",
doi = "10.1109/OMEMS.2005.1540090",
language = "English",
isbn = "0-7803-9278-7",
series = "Optical MEMS, IEEE/LEOS International Conference on",
publisher = "IEEE Institute of Electrical and Electronic Engineers",
pages = "87--88",
booktitle = "IEEE/LEOS International Conference on Optical MEMs and Their Applications",

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Kololuoma, T, Tuomikoski, M, Haring, T & Kopola, H 2005, Roll-to-roll manufacturing technologies for flexible MEMS applications. in IEEE/LEOS International Conference on Optical MEMs and Their Applications. Optical MEMS, IEEE/LEOS International Conference on, pp. 87-88, IEEE/LEOS International Conference on Optical MEMs and Their Applications, Oulu, Finland, 1/08/05. https://doi.org/10.1109/OMEMS.2005.1540090

Roll-to-roll manufacturing technologies for flexible MEMS applications. / Kololuoma, Terho; Tuomikoski, Markus; Haring, Tomi; Kopola, Harri.

IEEE/LEOS International Conference on Optical MEMs and Their Applications. 2005. p. 87-88 (Optical MEMS, IEEE/LEOS International Conference on).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - Roll-to-roll manufacturing technologies for flexible MEMS applications

AU - Kololuoma, Terho

AU - Tuomikoski, Markus

AU - Haring, Tomi

AU - Kopola, Harri

PY - 2005

Y1 - 2005

U2 - 10.1109/OMEMS.2005.1540090

DO - 10.1109/OMEMS.2005.1540090

M3 - Conference article in proceedings

SN - 0-7803-9278-7

T3 - Optical MEMS, IEEE/LEOS International Conference on

SP - 87

EP - 88

BT - IEEE/LEOS International Conference on Optical MEMs and Their Applications

ER -

Kololuoma T, Tuomikoski M, Haring T, Kopola H. Roll-to-roll manufacturing technologies for flexible MEMS applications. In IEEE/LEOS International Conference on Optical MEMs and Their Applications. 2005. p. 87-88. (Optical MEMS, IEEE/LEOS International Conference on). https://doi.org/10.1109/OMEMS.2005.1540090