Roll-to-roll manufacturing technologies for flexible MEMS applications

Terho Kololuoma; Markus Tuomikoski; Tomi Haring; Harri Kopola

doi:10.1109/OMEMS.2005.1540090

Roll-to-roll manufacturing technologies for flexible MEMS applications

Terho Kololuoma
, Markus Tuomikoski
, Tomi Haring
, Harri Kopola

University of Eastern Finland

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

3 Citations (Scopus)

Abstract

Roll-to-roll fabrication of electrical and optical structures and functional elements on web will be described. Based on the realized components, the potential of the printing techniques for volume-scale MEMS fabrication will be introduced.

Original language	English
Title of host publication	IEEE/LEOS International Conference on Optical MEMs and Their Applications
Publisher	IEEE Institute of Electrical and Electronic Engineers
Pages	87-88
ISBN (Print)	978-0-7803-9278-6
DOIs	https://doi.org/10.1109/OMEMS.2005.1540090
Publication status	Published - 2005
MoE publication type	A4 Article in a conference publication
Event	IEEE/LEOS International Conference on Optical MEMs and Their Applications - Oulu, Finland Duration: 1 Aug 2005 → 4 Aug 2005

Publication series

Series	Optical MEMS, IEEE/LEOS International Conference on
ISSN	2160-5033

Conference

Conference	IEEE/LEOS International Conference on Optical MEMs and Their Applications
Country/Territory	Finland
City	Oulu
Period	1/08/05 → 4/08/05

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

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10.1109/OMEMS.2005.1540090

Cite this

@inproceedings{5a29f3905daf4b3cb16e8140904df7bd,

title = "Roll-to-roll manufacturing technologies for flexible MEMS applications",

abstract = "Roll-to-roll fabrication of electrical and optical structures and functional elements on web will be described. Based on the realized components, the potential of the printing techniques for volume-scale MEMS fabrication will be introduced.",

author = "Terho Kololuoma and Markus Tuomikoski and Tomi Haring and Harri Kopola",

year = "2005",

doi = "10.1109/OMEMS.2005.1540090",

language = "English",

isbn = "978-0-7803-9278-6",

series = "Optical MEMS, IEEE/LEOS International Conference on",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

pages = "87--88",

booktitle = "IEEE/LEOS International Conference on Optical MEMs and Their Applications",

address = "United States",

note = "IEEE/LEOS International Conference on Optical MEMs and Their Applications ; Conference date: 01-08-2005 Through 04-08-2005",

}

Kololuoma, T, Tuomikoski, M, Haring, T & Kopola, H 2005, Roll-to-roll manufacturing technologies for flexible MEMS applications. in IEEE/LEOS International Conference on Optical MEMs and Their Applications. IEEE Institute of Electrical and Electronic Engineers, Optical MEMS, IEEE/LEOS International Conference on, pp. 87-88, IEEE/LEOS International Conference on Optical MEMs and Their Applications, Oulu, Finland, 1/08/05. https://doi.org/10.1109/OMEMS.2005.1540090

Roll-to-roll manufacturing technologies for flexible MEMS applications. / Kololuoma, Terho; Tuomikoski, Markus; Haring, Tomi et al.
IEEE/LEOS International Conference on Optical MEMs and Their Applications. IEEE Institute of Electrical and Electronic Engineers, 2005. p. 87-88 (Optical MEMS, IEEE/LEOS International Conference on).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Roll-to-roll manufacturing technologies for flexible MEMS applications

AU - Kololuoma, Terho

AU - Tuomikoski, Markus

AU - Haring, Tomi

AU - Kopola, Harri

PY - 2005

Y1 - 2005

N2 - Roll-to-roll fabrication of electrical and optical structures and functional elements on web will be described. Based on the realized components, the potential of the printing techniques for volume-scale MEMS fabrication will be introduced.

AB - Roll-to-roll fabrication of electrical and optical structures and functional elements on web will be described. Based on the realized components, the potential of the printing techniques for volume-scale MEMS fabrication will be introduced.

U2 - 10.1109/OMEMS.2005.1540090

DO - 10.1109/OMEMS.2005.1540090

M3 - Conference article in proceedings

SN - 978-0-7803-9278-6

T3 - Optical MEMS, IEEE/LEOS International Conference on

SP - 87

EP - 88

BT - IEEE/LEOS International Conference on Optical MEMs and Their Applications

PB - IEEE Institute of Electrical and Electronic Engineers

T2 - IEEE/LEOS International Conference on Optical MEMs and Their Applications

Y2 - 1 August 2005 through 4 August 2005

ER -

Roll-to-roll manufacturing technologies for flexible MEMS applications

Abstract

Publication series

Conference

UN SDGs

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