Roll-to-roll pilot nanoimprinting process for backlight devices

Tapio Mäkelä (Corresponding Author), Tomi Haatainen

Research output: Contribution to journalArticleScientificpeer-review

13 Citations (Scopus)

Abstract

A pilot scale roll-to-roll manufacturing process for backlight devices was demonstrated using Poly(methyl methacrylate) (PMMA) film. Backlight device (28 × 28) mm2 consist more than 78,000 binary elements with different orientation. Each element has 40 trenches with 5 μm width and 1.3 μm thick, totally 3.1 million trenches in one device. These devices can be used for display illumination in various applications when three LED is connected on the other end of the device. More than 1000 device was printed on 50 mm wide 375 μm thick PMMA web using custom made nanoimprinting equipment. These devices demonstrate a high throughput and a low cost production possibility for micron- and submicron optical structures.

The printed patterns were analysed by using optical microscopy, atomic force microscopy (AFM) and confocal microscopy. The backlight device after LED integration was characterized using luminescence measurements. The three surface mounted LED is connect to the upper side of printed PMMA device to give light in the polymer film. To collect statistics, every 50th sample was analysed. The pattern replication is good and the depth of the imprinted structure is typically in the range of 1.2–1.4 μm when limits for working device is ca. 1.0 μm. The optical properties of the analysed devices show good homogeneity inside one device. The standard deviation for the measured luminescence values for all devices was within 17% which is still acceptable for final production. No drastic wearing of the stamp can be seen after pilot manufacturing.

Original languageEnglish
Pages (from-to)89-91
Number of pages3
JournalMicroelectronic Engineering
Volume97
DOIs
Publication statusPublished - 2012
MoE publication typeA1 Journal article-refereed
Event37th International Conference on Micro- and Nano-Engineering, MNE 2011 - Berlin, Germany
Duration: 19 Sep 201123 Sep 2011
Conference number: 37

Fingerprint

Polymethyl Methacrylate
Polymethyl methacrylates
Light emitting diodes
Luminescence
Confocal microscopy
Polymer films
Optical microscopy
Atomic force microscopy
Optical properties
Lighting
Display devices
Throughput
Statistics
polymethyl methacrylate
light emitting diodes
Costs
manufacturing
luminescence
microscopy
homogeneity

Keywords

  • Backlight
  • hot embossing
  • nanoimprinting
  • PMMA
  • roll-to-roll

Cite this

@article{51370d8b0c99484caf1c87b1a0a9d3c5,
title = "Roll-to-roll pilot nanoimprinting process for backlight devices",
abstract = "A pilot scale roll-to-roll manufacturing process for backlight devices was demonstrated using Poly(methyl methacrylate) (PMMA) film. Backlight device (28 × 28) mm2 consist more than 78,000 binary elements with different orientation. Each element has 40 trenches with 5 μm width and 1.3 μm thick, totally 3.1 million trenches in one device. These devices can be used for display illumination in various applications when three LED is connected on the other end of the device. More than 1000 device was printed on 50 mm wide 375 μm thick PMMA web using custom made nanoimprinting equipment. These devices demonstrate a high throughput and a low cost production possibility for micron- and submicron optical structures.The printed patterns were analysed by using optical microscopy, atomic force microscopy (AFM) and confocal microscopy. The backlight device after LED integration was characterized using luminescence measurements. The three surface mounted LED is connect to the upper side of printed PMMA device to give light in the polymer film. To collect statistics, every 50th sample was analysed. The pattern replication is good and the depth of the imprinted structure is typically in the range of 1.2–1.4 μm when limits for working device is ca. 1.0 μm. The optical properties of the analysed devices show good homogeneity inside one device. The standard deviation for the measured luminescence values for all devices was within 17{\%} which is still acceptable for final production. No drastic wearing of the stamp can be seen after pilot manufacturing.",
keywords = "Backlight, hot embossing, nanoimprinting, PMMA, roll-to-roll",
author = "Tapio M{\"a}kel{\"a} and Tomi Haatainen",
note = "Based on conf. paper P-LITH-045",
year = "2012",
doi = "10.1016/j.mee.2012.03.031",
language = "English",
volume = "97",
pages = "89--91",
journal = "Microelectronic Engineering",
issn = "0167-9317",
publisher = "Elsevier",

}

Roll-to-roll pilot nanoimprinting process for backlight devices. / Mäkelä, Tapio (Corresponding Author); Haatainen, Tomi.

In: Microelectronic Engineering, Vol. 97, 2012, p. 89-91.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Roll-to-roll pilot nanoimprinting process for backlight devices

AU - Mäkelä, Tapio

AU - Haatainen, Tomi

N1 - Based on conf. paper P-LITH-045

PY - 2012

Y1 - 2012

N2 - A pilot scale roll-to-roll manufacturing process for backlight devices was demonstrated using Poly(methyl methacrylate) (PMMA) film. Backlight device (28 × 28) mm2 consist more than 78,000 binary elements with different orientation. Each element has 40 trenches with 5 μm width and 1.3 μm thick, totally 3.1 million trenches in one device. These devices can be used for display illumination in various applications when three LED is connected on the other end of the device. More than 1000 device was printed on 50 mm wide 375 μm thick PMMA web using custom made nanoimprinting equipment. These devices demonstrate a high throughput and a low cost production possibility for micron- and submicron optical structures.The printed patterns were analysed by using optical microscopy, atomic force microscopy (AFM) and confocal microscopy. The backlight device after LED integration was characterized using luminescence measurements. The three surface mounted LED is connect to the upper side of printed PMMA device to give light in the polymer film. To collect statistics, every 50th sample was analysed. The pattern replication is good and the depth of the imprinted structure is typically in the range of 1.2–1.4 μm when limits for working device is ca. 1.0 μm. The optical properties of the analysed devices show good homogeneity inside one device. The standard deviation for the measured luminescence values for all devices was within 17% which is still acceptable for final production. No drastic wearing of the stamp can be seen after pilot manufacturing.

AB - A pilot scale roll-to-roll manufacturing process for backlight devices was demonstrated using Poly(methyl methacrylate) (PMMA) film. Backlight device (28 × 28) mm2 consist more than 78,000 binary elements with different orientation. Each element has 40 trenches with 5 μm width and 1.3 μm thick, totally 3.1 million trenches in one device. These devices can be used for display illumination in various applications when three LED is connected on the other end of the device. More than 1000 device was printed on 50 mm wide 375 μm thick PMMA web using custom made nanoimprinting equipment. These devices demonstrate a high throughput and a low cost production possibility for micron- and submicron optical structures.The printed patterns were analysed by using optical microscopy, atomic force microscopy (AFM) and confocal microscopy. The backlight device after LED integration was characterized using luminescence measurements. The three surface mounted LED is connect to the upper side of printed PMMA device to give light in the polymer film. To collect statistics, every 50th sample was analysed. The pattern replication is good and the depth of the imprinted structure is typically in the range of 1.2–1.4 μm when limits for working device is ca. 1.0 μm. The optical properties of the analysed devices show good homogeneity inside one device. The standard deviation for the measured luminescence values for all devices was within 17% which is still acceptable for final production. No drastic wearing of the stamp can be seen after pilot manufacturing.

KW - Backlight

KW - hot embossing

KW - nanoimprinting

KW - PMMA

KW - roll-to-roll

U2 - 10.1016/j.mee.2012.03.031

DO - 10.1016/j.mee.2012.03.031

M3 - Article

VL - 97

SP - 89

EP - 91

JO - Microelectronic Engineering

JF - Microelectronic Engineering

SN - 0167-9317

ER -