Abstract
A high volume printing process for polymer gratings at submicron scale was developed for cellulose acetate (CA) film. A flexible Ni-stamp, consisting printing pattern, was used as a master for patterning process. High speed roll-to-roll manufacturing method was tested using custom made roll-to-roll device. Device enables a high throughput and a low cost production method for micron and submicron structures. This small scale device is suitable for continuous imprinting using 50 mm wide plastic web. Roll-to-roll device consist an unwinder, an imprinting unit and a rewinder. We demonstrated continuous imprinting process using the 95 micron thick CA film as a substrate. Printing speeds from 0.2 m/min up to 20 m/min was used to demonstrate high volume process. Lifetime of the stamp was long and no structural change was observed after a several meters of imprints. The best replication is achieved at the speed of 0.2 m/min using pressure of 8 MPa and temperature of 105 °C. Height and quality of the printed gratings was characterized by AFM.
Original language | English |
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Pages (from-to) | 2045-2047 |
Number of pages | 3 |
Journal | Microelectronic Engineering |
Volume | 88 |
Issue number | 8 |
DOIs | |
Publication status | Published - 2011 |
MoE publication type | A1 Journal article-refereed |
Event | 36th International Conference on Micro- and Nano-Engineering, MNE 2010 - Genoa, Italy Duration: 19 Sept 2010 → 22 Sept 2010 |
Keywords
- Nanoimprinting
- Roll embossing
- Roll-to-roll manufacturing