Abstract
Here we propose and demonstrate Roll-to-Roll (RtR)
thermal nanoimprint lithography for high volume
production of microfluidic devices. In this study we have
used an earlier proposed microfluidic separation
technique called pinched flow fractionation (PFF) as the
microfluidic model system. Formation and sealing of the
microfluidic channels were carried out in a two step
fabrication process with a RtR thermal nanoimprint
machine. The process was optimized to enable fabrication
of micrometer sized channels and we established a
production line with a volume of 240 devices/hr;
approximately 60 times larger compared to planar thermal
nanoimprint lithography. Furthermore, the device
materials and machine cost in RtR fabricated PFF devices
is 0.50 /devices, approximately 200 times cheaper
compared to planar thermal nanoimprint lithography. The
RtR nanoimprinted devices were used for separation of 1
?m and 3 ?m polystyrene microspheres, and the separation
results were
compared against devices having the same layout but
fabricated by planar thermal nanoimprint lithography.
Finally, separation of the microspheres has been enhanced
with a dummy structure in the broadening segment. This
dummy structure also gives better imprint results.
Original language | English |
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Title of host publication | Digest of The 7th International Conference on Nanoimprint and Nanoprint Technology (NNT'08). Kyoto, Japan, 13 - 15 Oct. 2008 |
Publisher | Japan Society of Applied Physics |
Pages | 200-201 |
ISBN (Print) | 4-9902472-6-4 |
Publication status | Published - 2008 |
MoE publication type | Not Eligible |
Keywords
- nanoimprint lithography
- roll-to-roll