Abstract
Here we propose and demonstrate Roll-to-Roll (RtR)
thermal nanoimprint lithography for high volume
production of microfluidic separation devices. Formation
and sealing of the microfluidic channels were carried out
in a two step fabrication process at a RtR thermal
nanoimprint machine.
Original language | English |
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Pages | 29, 7A-5 |
Publication status | Published - 2008 |
MoE publication type | Not Eligible |
Event | 34th International Conference on Micro & Nano Engineering, MNE 2008 - Athens, Greece Duration: 15 Sept 2008 → 19 Sept 2008 |
Conference
Conference | 34th International Conference on Micro & Nano Engineering, MNE 2008 |
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Country/Territory | Greece |
City | Athens |
Period | 15/09/08 → 19/09/08 |
Keywords
- nanoimprinting
- roll-to-roll
- microfluidic