Roll-to-roll UV Nanoimprinting

Tapio Mäkelä (Corresponding author), Tomi Haatainen, Jouni Ahopelto, Y. Kawaguchi

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Abstract

Roll-to-roll UV imprinting for UV curable resists will be an excellent alternative when low pressure and adhesion force is needed. In this work we demonstrate roll-to-roll UV stamp manufacturing principle and continuous roll-to-roll UV imprinting process.
Original languageEnglish
Title of host publicationProceedings of the 44. Annual Conference of the Finnish Physical Society
Place of PublicationJyväskylä
PublisherUniversity of Jyväskylä
Pages242
ISBN (Print)978-951-39-3834-5
Publication statusPublished - 2010
MoE publication typeNot Eligible
EventXLIV Physics Days - Fysiikan päivät 2010: 44th Annual Conference of the Finnish Physical Society - Jyväskylä, Finland
Duration: 11 Mar 201013 Mar 2010

Conference

ConferenceXLIV Physics Days - Fysiikan päivät 2010
CountryFinland
CityJyväskylä
Period11/03/1013/03/10

Fingerprint

adhesion
manufacturing
low pressure

Keywords

  • Roll-to-roll
  • UV
  • NIL
  • nanoimprinting

Cite this

Mäkelä, T., Haatainen, T., Ahopelto, J., & Kawaguchi, Y. (2010). Roll-to-roll UV Nanoimprinting. In Proceedings of the 44. Annual Conference of the Finnish Physical Society (pp. 242). [7.3.9] Jyväskylä: University of Jyväskylä. University of Jyväskylä: Department of Physics. Research Report, No. 3/2010
Mäkelä, Tapio ; Haatainen, Tomi ; Ahopelto, Jouni ; Kawaguchi, Y. / Roll-to-roll UV Nanoimprinting. Proceedings of the 44. Annual Conference of the Finnish Physical Society. Jyväskylä : University of Jyväskylä, 2010. pp. 242 (University of Jyväskylä: Department of Physics. Research Report; No. 3/2010).
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Mäkelä, T, Haatainen, T, Ahopelto, J & Kawaguchi, Y 2010, Roll-to-roll UV Nanoimprinting. in Proceedings of the 44. Annual Conference of the Finnish Physical Society., 7.3.9, University of Jyväskylä, Jyväskylä, University of Jyväskylä: Department of Physics. Research Report, no. 3/2010, pp. 242, XLIV Physics Days - Fysiikan päivät 2010, Jyväskylä, Finland, 11/03/10.

Roll-to-roll UV Nanoimprinting. / Mäkelä, Tapio (Corresponding author); Haatainen, Tomi; Ahopelto, Jouni; Kawaguchi, Y.

Proceedings of the 44. Annual Conference of the Finnish Physical Society. Jyväskylä : University of Jyväskylä, 2010. p. 242 7.3.9 (University of Jyväskylä: Department of Physics. Research Report; No. 3/2010).

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

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T1 - Roll-to-roll UV Nanoimprinting

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AU - Ahopelto, Jouni

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AB - Roll-to-roll UV imprinting for UV curable resists will be an excellent alternative when low pressure and adhesion force is needed. In this work we demonstrate roll-to-roll UV stamp manufacturing principle and continuous roll-to-roll UV imprinting process.

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KW - UV

KW - NIL

KW - nanoimprinting

M3 - Conference abstract in proceedings

SN - 978-951-39-3834-5

SP - 242

BT - Proceedings of the 44. Annual Conference of the Finnish Physical Society

PB - University of Jyväskylä

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Mäkelä T, Haatainen T, Ahopelto J, Kawaguchi Y. Roll-to-roll UV Nanoimprinting. In Proceedings of the 44. Annual Conference of the Finnish Physical Society. Jyväskylä: University of Jyväskylä. 2010. p. 242. 7.3.9. (University of Jyväskylä: Department of Physics. Research Report; No. 3/2010).