Roll-to-roll UV Nanoimprinting

Tapio Mäkelä (Corresponding author), Tomi Haatainen, Jouni Ahopelto, Y. Kawaguchi

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Abstract

Roll-to-roll UV imprinting for UV curable resists will be an excellent alternative when low pressure and adhesion force is needed. In this work we demonstrate roll-to-roll UV stamp manufacturing principle and continuous roll-to-roll UV imprinting process.
Original languageEnglish
Title of host publicationProceedings of the 44. Annual Conference of the Finnish Physical Society
Place of PublicationJyväskylä
PublisherUniversity of Jyväskylä
Pages242
ISBN (Print)978-951-39-3834-5
Publication statusPublished - 2010
MoE publication typeNot Eligible
EventXLIV Physics Days - Fysiikan päivät 2010: 44th Annual Conference of the Finnish Physical Society - Jyväskylä, Finland
Duration: 11 Mar 201013 Mar 2010

Publication series

SeriesUniversity of Jyväskylä: Department of Physics. Research Report
Number3/2010
ISSN0075-465X

Conference

ConferenceXLIV Physics Days - Fysiikan päivät 2010
CountryFinland
CityJyväskylä
Period11/03/1013/03/10

Keywords

  • Roll-to-roll
  • UV
  • NIL
  • nanoimprinting

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