Roll-to-roll UV Nanoimprinting

Tapio Mäkelä (Corresponding author), Tomi Haatainen, Jouni Ahopelto, Y. Kawaguchi

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    Abstract

    Roll-to-roll UV imprinting for UV curable resists will be an excellent alternative when low pressure and adhesion force is needed. In this work we demonstrate roll-to-roll UV stamp manufacturing principle and continuous roll-to-roll UV imprinting process.
    Original languageEnglish
    Title of host publicationProceedings of the 44. Annual Conference of the Finnish Physical Society
    Place of PublicationJyväskylä
    PublisherUniversity of Jyväskylä
    Pages242
    ISBN (Print)978-951-39-3834-5
    Publication statusPublished - 2010
    MoE publication typeNot Eligible
    EventXLIV Physics Days - Fysiikan päivät 2010: 44th Annual Conference of the Finnish Physical Society - Jyväskylä, Finland
    Duration: 11 Mar 201013 Mar 2010

    Publication series

    SeriesUniversity of Jyväskylä: Department of Physics. Research Report
    Number3/2010
    ISSN0075-465X

    Conference

    ConferenceXLIV Physics Days - Fysiikan päivät 2010
    Country/TerritoryFinland
    CityJyväskylä
    Period11/03/1013/03/10

    Keywords

    • Roll-to-roll
    • UV
    • NIL
    • nanoimprinting

    Fingerprint

    Dive into the research topics of 'Roll-to-roll UV Nanoimprinting'. Together they form a unique fingerprint.

    Cite this