Room-Temperature Silicon Platform for GHz-Frequency Nanoelectro-Opto-Mechanical Systems

Daniel Navarro-Urrios; Martín F. Colombano; Guillermo Arregui; Guilhem Madiot; Alessandro Pitanti; Amadeu Griol; Tapani Makkonen; Jouni Ahopelto; Clivia M. Sotomayor-Torres; Alejandro Martínez

doi:10.1021/acsphotonics.1c01614

Room-Temperature Silicon Platform for GHz-Frequency Nanoelectro-Opto-Mechanical Systems

Daniel Navarro-Urrios, Martín F. Colombano, Guillermo Arregui, Guilhem Madiot, Alessandro Pitanti, Amadeu Griol, Tapani Makkonen, Jouni Ahopelto, Clivia M. Sotomayor-Torres, Alejandro Martínez (Corresponding Author)

BA6201 MEMS

Research output: Contribution to journal › Article › Scientific › peer-review

15 Citations (Scopus)

Abstract

Nanoelectro-opto-mechanical systems enable the synergistic coexistence of electrical, mechanical, and optical signals on a chip to realize new functions. Most of the technology platforms proposed for the fabrication of these systems so far are not fully compatible with the mainstream CMOS technology, thus, hindering the mass-scale utilization. We have developed a CMOS technology platform for nanoelectro-opto-mechanical systems that includes piezoelectric interdigitated transducers for electronic driving of mechanical signals and nanocrystalline silicon nanobeams for an enhanced optomechanical interaction. Room-Temperature operation of devices at 2 GHz and with peak sensitivity down to 2.6 cavity phonons is demonstrated. Our proof-of-principle technology platform can be integrated and interfaced with silicon photonics, electronics, and MEMS devices and may enable multiple functions for coherent signal processing in the classical and quantum domains.

Original language	English
Pages (from-to)	413-419
Journal	ACS Photonics
Volume	9
Issue number	2
DOIs	https://doi.org/10.1021/acsphotonics.1c01614
Publication status	Published - 16 Feb 2022
MoE publication type	A1 Journal article-refereed

Funding

This research has received funding from the European Union H2020 FET Open Project PHENOMEN (No. 713450). The ICN2 authors acknowledge support by the Severo Ochoa program from Spanish MINECO (Grant No. SEV-2019-0706), the MCIN project SIP (PGC2018-101743-B-100), and by the CERCA Programme Generalitat de Catalunya. G.A. was supported by a BIST and MFC by a S. Ochoa Project Ph.D. studentships. G. M. acknowledges support from the EU ERC project LEIT (GA Nr. 885689). A.M. acknowledges support from MCIN/AEI/10.13039/501100011033/ (Projects PGC2018-094490-BC21 and ICTS-2017-28-UPV-9), from Generalitat Valenciana (BEST/2020/178, PROMETEO/2019/123, and IDIFEDER/2021/061) and from “Unión Europea NextGenerationEU/PRTR”.

Keywords

cavity optomechanics
interdigitated transducers
microwave-To-optics conversion
nanoelectro-opto-mechanical systems (NEOMS)
silicon photonics

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10.1021/acsphotonics.1c01614Licence: CC BY

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@article{1ba86b0442814181ad7da72f5345cee6,

title = "Room-Temperature Silicon Platform for GHz-Frequency Nanoelectro-Opto-Mechanical Systems",

abstract = "Nanoelectro-opto-mechanical systems enable the synergistic coexistence of electrical, mechanical, and optical signals on a chip to realize new functions. Most of the technology platforms proposed for the fabrication of these systems so far are not fully compatible with the mainstream CMOS technology, thus, hindering the mass-scale utilization. We have developed a CMOS technology platform for nanoelectro-opto-mechanical systems that includes piezoelectric interdigitated transducers for electronic driving of mechanical signals and nanocrystalline silicon nanobeams for an enhanced optomechanical interaction. Room-Temperature operation of devices at 2 GHz and with peak sensitivity down to 2.6 cavity phonons is demonstrated. Our proof-of-principle technology platform can be integrated and interfaced with silicon photonics, electronics, and MEMS devices and may enable multiple functions for coherent signal processing in the classical and quantum domains.",

keywords = "cavity optomechanics, interdigitated transducers, microwave-To-optics conversion, nanoelectro-opto-mechanical systems (NEOMS), silicon photonics",

author = "Daniel Navarro-Urrios and Colombano, {Mart{\'i}n F.} and Guillermo Arregui and Guilhem Madiot and Alessandro Pitanti and Amadeu Griol and Tapani Makkonen and Jouni Ahopelto and Sotomayor-Torres, {Clivia M.} and Alejandro Mart{\'i}nez",

note = "{\textcopyright} 2022 American Chemical Society.",

year = "2022",

month = feb,

day = "16",

doi = "10.1021/acsphotonics.1c01614",

language = "English",

volume = "9",

pages = "413--419",

journal = "ACS Photonics",

issn = "2330-4022",

publisher = "American Chemical Society ACS",

number = "2",

}

TY - JOUR

T1 - Room-Temperature Silicon Platform for GHz-Frequency Nanoelectro-Opto-Mechanical Systems

AU - Navarro-Urrios, Daniel

AU - Colombano, Martín F.

AU - Arregui, Guillermo

AU - Madiot, Guilhem

AU - Pitanti, Alessandro

AU - Griol, Amadeu

AU - Makkonen, Tapani

AU - Ahopelto, Jouni

AU - Sotomayor-Torres, Clivia M.

AU - Martínez, Alejandro

PY - 2022/2/16

Y1 - 2022/2/16

N2 - Nanoelectro-opto-mechanical systems enable the synergistic coexistence of electrical, mechanical, and optical signals on a chip to realize new functions. Most of the technology platforms proposed for the fabrication of these systems so far are not fully compatible with the mainstream CMOS technology, thus, hindering the mass-scale utilization. We have developed a CMOS technology platform for nanoelectro-opto-mechanical systems that includes piezoelectric interdigitated transducers for electronic driving of mechanical signals and nanocrystalline silicon nanobeams for an enhanced optomechanical interaction. Room-Temperature operation of devices at 2 GHz and with peak sensitivity down to 2.6 cavity phonons is demonstrated. Our proof-of-principle technology platform can be integrated and interfaced with silicon photonics, electronics, and MEMS devices and may enable multiple functions for coherent signal processing in the classical and quantum domains.

AB - Nanoelectro-opto-mechanical systems enable the synergistic coexistence of electrical, mechanical, and optical signals on a chip to realize new functions. Most of the technology platforms proposed for the fabrication of these systems so far are not fully compatible with the mainstream CMOS technology, thus, hindering the mass-scale utilization. We have developed a CMOS technology platform for nanoelectro-opto-mechanical systems that includes piezoelectric interdigitated transducers for electronic driving of mechanical signals and nanocrystalline silicon nanobeams for an enhanced optomechanical interaction. Room-Temperature operation of devices at 2 GHz and with peak sensitivity down to 2.6 cavity phonons is demonstrated. Our proof-of-principle technology platform can be integrated and interfaced with silicon photonics, electronics, and MEMS devices and may enable multiple functions for coherent signal processing in the classical and quantum domains.

KW - cavity optomechanics

KW - interdigitated transducers

KW - microwave-To-optics conversion

KW - nanoelectro-opto-mechanical systems (NEOMS)

KW - silicon photonics

UR - http://www.scopus.com/inward/record.url?scp=85124608463&partnerID=8YFLogxK

U2 - 10.1021/acsphotonics.1c01614

DO - 10.1021/acsphotonics.1c01614

M3 - Article

C2 - 36193113

AN - SCOPUS:85124608463

SN - 2330-4022

VL - 9

SP - 413

EP - 419

JO - ACS Photonics

JF - ACS Photonics

IS - 2

ER -

Room-Temperature Silicon Platform for GHz-Frequency Nanoelectro-Opto-Mechanical Systems

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Keywords

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