Room-Temperature Silicon Platform for GHz-Frequency Nanoelectro-Opto-Mechanical Systems

Daniel Navarro-Urrios, Martín F. Colombano, Guillermo Arregui, Guilhem Madiot, Alessandro Pitanti, Amadeu Griol, Tapani Makkonen, Jouni Ahopelto, Clivia M. Sotomayor-Torres, Alejandro Martínez* (Corresponding Author)

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

15 Citations (Scopus)

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Engineering

Material Science