Keyphrases
Room Temperature
100%
GHz Frequency
100%
Technology Platform
100%
Optomechanical System
100%
Silicon Platform
100%
CMOS Technology
66%
Mechanical Signals
66%
Electronic Devices
33%
Phonons
33%
Electrical Signal
33%
MEMS Devices
33%
Multiple Functions
33%
Silicon MEMS
33%
Nanocrystalline Silicon
33%
Optical Signal
33%
Mass Scale
33%
Silicon Electronics
33%
Room Temperature Operation
33%
Silicon Photonic Device
33%
Optomechanical Interaction
33%
Interdigitated Transducers
33%
Photonic MEMS
33%
Coherent Signal Processing
33%
Classical Domain
33%
Quantum Domain
33%
Silicon Nanobeam
33%
INIS
silicon
100%
signals
100%
ghz range
100%
temperature range 0273-0400 k
100%
devices
66%
interactions
33%
processing
33%
operation
33%
sensitivity
33%
peaks
33%
cavities
33%
fabrication
33%
phonons
33%
piezoelectricity
33%
transducers
33%
Engineering
Mechanical Systems
100%
Room Temperature
100%
Piezoelectric
33%
Electrical Signal
33%
Optical Signal
33%
Microelectromechanical System
33%
Nanocrystalline
33%
Silicon Photonics
33%
Transducer
33%
Material Science
Silicon
100%
Nanocrystalline Silicon
50%
Piezoelectricity
50%
Microelectromechanical System
50%