Scanning micromechanical mirror for fine-pointing units of intersatellite optical links

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

A light and fast 2-axial fine-pointing mirror has a number of space applications, especially in intersatellite optical links. The fine pointing of laser beams in optical links is currently realized with electromagnetic and piezoelectric actuators, which are relatively large and heavy. MEMS technology bears a high potential in space applications offering reduction of device size, mass and power consumption. Micro technology makes batch mode fabrication possible yielding a low cost per unit. VTT Automation has designed and partially tested a silicon micro machined electrostatically actuated 2-axial mirror, which can be controlled with a microradian accuracy and a large bandwidth over the angular range of +/- 3 mrad.
Original languageEnglish
Title of host publicationDesign, Test, Integration, and Packaging of MEMS/MOEMS
PublisherInternational Society for Optics and Photonics SPIE
Pages372-378
ISBN (Print)0-8194-3645-3
DOIs
Publication statusPublished - 2000
MoE publication typeA4 Article in a conference publication
EventSymposium on Design, Test, Integration, and Packaging of MEMS/MOEMS, DTIP 2000 - Paris, France
Duration: 9 May 200011 May 2000

Publication series

SeriesProceedings of SPIE
Volume4019
ISSN0277-786X

Conference

ConferenceSymposium on Design, Test, Integration, and Packaging of MEMS/MOEMS, DTIP 2000
CountryFrance
CityParis
Period9/05/0011/05/00

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    Graeffe, J., Suhonen, M., Sipola, H., & Sillanpää, T. (2000). Scanning micromechanical mirror for fine-pointing units of intersatellite optical links. In Design, Test, Integration, and Packaging of MEMS/MOEMS (pp. 372-378). International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 4019 https://doi.org/10.1117/12.382277