Abstract
A light and fast 2-axial fine-pointing mirror has a number of space applications, especially in intersatellite optical links. The fine pointing of laser beams in optical links is currently realized with electromagnetic and piezoelectric actuators, which are relatively large and heavy. MEMS technology bears a high potential in space applications offering reduction of device size, mass and power consumption. Micro technology makes batch mode fabrication possible yielding a low cost per unit. VTT Automation has designed and partially tested a silicon micro machined electrostatically actuated 2-axial mirror, which can be controlled with a microradian accuracy and a large bandwidth over the angular range of +/- 3 mrad.
| Original language | English |
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| Title of host publication | Design, Test, Integration, and Packaging of MEMS/MOEMS |
| Publisher | International Society for Optics and Photonics SPIE |
| Pages | 372-378 |
| ISBN (Print) | 0-8194-3645-3 |
| DOIs | |
| Publication status | Published - 2000 |
| MoE publication type | A4 Article in a conference publication |
| Event | Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS, DTIP 2000 - Paris, France Duration: 9 May 2000 → 11 May 2000 |
Publication series
| Series | Proceedings of SPIE |
|---|---|
| Volume | 4019 |
| ISSN | 0277-786X |
Conference
| Conference | Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS, DTIP 2000 |
|---|---|
| Country/Territory | France |
| City | Paris |
| Period | 9/05/00 → 11/05/00 |