Scanning micromechanical mirror for fine-pointing units of intersatellite optical links

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Abstract

    A light and fast 2-axial fine-pointing mirror has a number of space applications, especially in intersatellite optical links. The fine pointing of laser beams in optical links is currently realized with electromagnetic and piezoelectric actuators, which are relatively large and heavy. MEMS technology bears a high potential in space applications offering reduction of device size, mass and power consumption. Micro technology makes batch mode fabrication possible yielding a low cost per unit. VTT Automation has designed and partially tested a silicon micro machined electrostatically actuated 2-axial mirror, which can be controlled with a microradian accuracy and a large bandwidth over the angular range of +/- 3 mrad.
    Original languageEnglish
    Title of host publicationDesign, Test, Integration, and Packaging of MEMS/MOEMS
    PublisherInternational Society for Optics and Photonics SPIE
    Pages372-378
    ISBN (Print)0-8194-3645-3
    DOIs
    Publication statusPublished - 2000
    MoE publication typeA4 Article in a conference publication
    EventSymposium on Design, Test, Integration, and Packaging of MEMS/MOEMS, DTIP 2000 - Paris, France
    Duration: 9 May 200011 May 2000

    Publication series

    SeriesProceedings of SPIE
    Volume4019
    ISSN0277-786X

    Conference

    ConferenceSymposium on Design, Test, Integration, and Packaging of MEMS/MOEMS, DTIP 2000
    CountryFrance
    CityParis
    Period9/05/0011/05/00

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