Scanning micromechanical mirror for fine-pointing units of intersatellite optical links

Keyphrases

• Micromechanics 100%
• Inter-satellite 100%
• Optical Link 100%
• Fine Pointing 100%
• Space Application 66%
• Laser Beams 33%
• Power Consumption 33%
• Microtechnology 33%
• Large Bandwidth 33%
• Micromachining 33%
• Batch Mode 33%
• Electrostatically Actuated 33%
• Piezoelectric Actuator 33%
• Angular Range 33%
• Micro-electro-mechanical Systems Technology 33%
• Resolution Bandwidth 33%
• Cost per Unit 33%
• Electromagnetic Actuator 33%
• Device Sizing 33%
• Mass Consumption 33%
• Pointing Mirror 33%
• Device Power 33%

INIS

• units 100%
• mirrors 100%
• applications 66%
• space 66%
• cost 33%
• devices 33%
• silicon 33%
• power 33%
• size 33%
• reduction 33%
• range 33%
• automation 33%
• actuators 33%
• lasers 33%
• beams 33%
• resolution 33%
• fabrication 33%
• piezoelectricity 33%
• bears 33%

Engineering

• Optical Link 100%
• Space Application 66%
• Electric Power Utilization 33%
• System Technology 33%
• Micro-Electro-Mechanical System 33%
• Mass Consumption 33%
• Angular Range 33%
• Microtechnology 33%
• Laser Beams 33%
• Piezoelectric Actuator 33%