Scatterometer for characterization of diffractive optical elements

H. Husu, T. Saastamoinen, J. Laukkanen, S. Siitonen, J. Turunen, Antti Lassila

    Research output: Contribution to journalArticleScientificpeer-review

    4 Citations (Scopus)

    Abstract

    Diffractive optical elements can control light beyond the capabilities of traditional optical components, which offers great opportunities for numerous applications. However, modern functionalities are related to even smaller feature sizes, which causes remarkable challenges for the structure measurements in the nanoscale. The current methods are not optimal for the characterization of diffractive structures. Optical scatterometry, however, would be a good tool for non-destructive characterization, and in particular, for inline process control of the fabrication. In this paper, detailed information about a goniometric scatterometer built at MIKES (Centre for Metrology and Accreditation), basics of the inverse problem approach for solving the parameters of the structure and first measurements for confirming the functionality of the scatterometer as well as the capabilities of it are discussed.
    Original languageEnglish
    Article number044019
    Number of pages8
    JournalMeasurement Science and Technology
    Volume25
    Issue number4
    DOIs
    Publication statusPublished - 2014
    MoE publication typeA1 Journal article-refereed

    Keywords

    • optical diffraction gratings
    • metrology
    • nanotechnology
    • nanomaterials

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