Scatterometer for characterization of diffractive optical elements
- Hannu Husu
- , T. Saastamoinen
- , J. Laukkanen
- , S. Siitonen
- , J. Turunen
- , Antti Lassila
- University of Eastern Finland
- Nanocomp Oy Ltd
- Centre for Metrology and Accreditation Finland (MIKES)
Research output: Contribution to journal › Article › Scientific › peer-review
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(Scopus)